磁控溅射在聚合物基底上沉积涂层的挑战

S. Dudin, S. Yakovin, A. Zykov, N. Yefymenko, Oleksandr Dakhov
{"title":"磁控溅射在聚合物基底上沉积涂层的挑战","authors":"S. Dudin, S. Yakovin, A. Zykov, N. Yefymenko, Oleksandr Dakhov","doi":"10.1109/NAP51885.2021.9568593","DOIUrl":null,"url":null,"abstract":"Hard coating deposition on plastics by magnetron sputtering encounters the common problem of the coating delamination if its thickness is more than 50-100 nm. The present study researches Tantalum-based coating deposition focusing on the optimal deposition regimes allowing thicker coating deposition on Polypropylene substrates without delamination. It is shown that the main reason for the delamination is compressive stress in the coating appearing due to bombardment by energetic particles. The delamination problem solution has been found in decreasing the bombarding particle energy by increasing gas pressure.","PeriodicalId":6735,"journal":{"name":"2021 IEEE 11th International Conference Nanomaterials: Applications & Properties (NAP)","volume":"30 1","pages":"1-5"},"PeriodicalIF":0.0000,"publicationDate":"2021-09-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Challenges of Coating Deposition on Polymer Substrate by Magnetron Sputtering\",\"authors\":\"S. Dudin, S. Yakovin, A. Zykov, N. Yefymenko, Oleksandr Dakhov\",\"doi\":\"10.1109/NAP51885.2021.9568593\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Hard coating deposition on plastics by magnetron sputtering encounters the common problem of the coating delamination if its thickness is more than 50-100 nm. The present study researches Tantalum-based coating deposition focusing on the optimal deposition regimes allowing thicker coating deposition on Polypropylene substrates without delamination. It is shown that the main reason for the delamination is compressive stress in the coating appearing due to bombardment by energetic particles. The delamination problem solution has been found in decreasing the bombarding particle energy by increasing gas pressure.\",\"PeriodicalId\":6735,\"journal\":{\"name\":\"2021 IEEE 11th International Conference Nanomaterials: Applications & Properties (NAP)\",\"volume\":\"30 1\",\"pages\":\"1-5\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-09-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2021 IEEE 11th International Conference Nanomaterials: Applications & Properties (NAP)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NAP51885.2021.9568593\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 IEEE 11th International Conference Nanomaterials: Applications & Properties (NAP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NAP51885.2021.9568593","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

磁控溅射在塑料上沉积硬涂层,当其厚度超过50- 100nm时,会遇到涂层分层的常见问题。本研究对钽基涂层沉积进行了研究,重点研究了在聚丙烯基底上沉积较厚涂层而不发生分层的最佳沉积制度。结果表明,导致分层的主要原因是高能粒子轰击涂层产生的压应力。通过增加气体压力来降低轰击粒子的能量,找到了解决分层问题的方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Challenges of Coating Deposition on Polymer Substrate by Magnetron Sputtering
Hard coating deposition on plastics by magnetron sputtering encounters the common problem of the coating delamination if its thickness is more than 50-100 nm. The present study researches Tantalum-based coating deposition focusing on the optimal deposition regimes allowing thicker coating deposition on Polypropylene substrates without delamination. It is shown that the main reason for the delamination is compressive stress in the coating appearing due to bombardment by energetic particles. The delamination problem solution has been found in decreasing the bombarding particle energy by increasing gas pressure.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信