{"title":"基于MEMS技术的VCSELS波长工程","authors":"F. Koyama","doi":"10.1109/OMN.2013.6659047","DOIUrl":null,"url":null,"abstract":"Our research activities on the wavelength control of MEMS VCSELs are reviewed. This paper explores the potential and challenges for wavelength engineering of VCSELs, including the wavelength athermalization and wavelength tuning. We demonstrate the athermal operation and wavelength tuning of 850nm-GaAs-VCSELs with a thermally actuated cantilever structure. The thermal actuation of a top DBR mirror enables to compensate the temperature drift of lasing wavelengths. The temperature dependence of lasing wavelengths could be reduced by adjusting the cantilever length. Also, a T-shape membrane structure was introduced for efficient electro-thermal tuning. Small temperature dependences and continuous wavelength tuning were obtained.","PeriodicalId":6334,"journal":{"name":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"1 1","pages":"37-38"},"PeriodicalIF":0.0000,"publicationDate":"2013-11-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Wavelength engineering of VCSELS based on MEMS technologies\",\"authors\":\"F. Koyama\",\"doi\":\"10.1109/OMN.2013.6659047\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Our research activities on the wavelength control of MEMS VCSELs are reviewed. This paper explores the potential and challenges for wavelength engineering of VCSELs, including the wavelength athermalization and wavelength tuning. We demonstrate the athermal operation and wavelength tuning of 850nm-GaAs-VCSELs with a thermally actuated cantilever structure. The thermal actuation of a top DBR mirror enables to compensate the temperature drift of lasing wavelengths. The temperature dependence of lasing wavelengths could be reduced by adjusting the cantilever length. Also, a T-shape membrane structure was introduced for efficient electro-thermal tuning. Small temperature dependences and continuous wavelength tuning were obtained.\",\"PeriodicalId\":6334,\"journal\":{\"name\":\"2013 International Conference on Optical MEMS and Nanophotonics (OMN)\",\"volume\":\"1 1\",\"pages\":\"37-38\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-11-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 International Conference on Optical MEMS and Nanophotonics (OMN)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMN.2013.6659047\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 International Conference on Optical MEMS and Nanophotonics (OMN)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2013.6659047","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Wavelength engineering of VCSELS based on MEMS technologies
Our research activities on the wavelength control of MEMS VCSELs are reviewed. This paper explores the potential and challenges for wavelength engineering of VCSELs, including the wavelength athermalization and wavelength tuning. We demonstrate the athermal operation and wavelength tuning of 850nm-GaAs-VCSELs with a thermally actuated cantilever structure. The thermal actuation of a top DBR mirror enables to compensate the temperature drift of lasing wavelengths. The temperature dependence of lasing wavelengths could be reduced by adjusting the cantilever length. Also, a T-shape membrane structure was introduced for efficient electro-thermal tuning. Small temperature dependences and continuous wavelength tuning were obtained.
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