{"title":"基于六方氮化硼的毫米波表面声波滤波器","authors":"SeokKim Yoon, C. Baek, B. Kong","doi":"10.1109/NANO51122.2021.9514353","DOIUrl":null,"url":null,"abstract":"We show that the operating frequency of surface acoustic wave filter can be significantly improved by adopting an emerging two-dimensional material: hexagonal boron nitride. Electromechanical properties estimated from first principles' analysis revealed that the material has the potential to realize RF filters in mm-Wave. The following piezoelectric simulation demonstrated an operation frequency as high as 36 GHz, which corresponds to Ka-band (from 26.5 to 40 GHz), with the insertion loss of 3 dB. This was achieved with the 150 nm period interdigital transducer on hexagonal boron nitride. Fabricating this scale of metal gratings is not very difficult with advanced lithography technology. As such, a low-power RF filter for 5G and beyond can be realized with the surface acoustic wave of hexagonal boron nitride.","PeriodicalId":6791,"journal":{"name":"2021 IEEE 21st International Conference on Nanotechnology (NANO)","volume":"34 1","pages":"138-141"},"PeriodicalIF":0.0000,"publicationDate":"2021-07-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"mm-Wave Surface Acoustic Wave Filter based on Hexagonal Boron Nitride\",\"authors\":\"SeokKim Yoon, C. Baek, B. Kong\",\"doi\":\"10.1109/NANO51122.2021.9514353\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We show that the operating frequency of surface acoustic wave filter can be significantly improved by adopting an emerging two-dimensional material: hexagonal boron nitride. Electromechanical properties estimated from first principles' analysis revealed that the material has the potential to realize RF filters in mm-Wave. The following piezoelectric simulation demonstrated an operation frequency as high as 36 GHz, which corresponds to Ka-band (from 26.5 to 40 GHz), with the insertion loss of 3 dB. This was achieved with the 150 nm period interdigital transducer on hexagonal boron nitride. Fabricating this scale of metal gratings is not very difficult with advanced lithography technology. As such, a low-power RF filter for 5G and beyond can be realized with the surface acoustic wave of hexagonal boron nitride.\",\"PeriodicalId\":6791,\"journal\":{\"name\":\"2021 IEEE 21st International Conference on Nanotechnology (NANO)\",\"volume\":\"34 1\",\"pages\":\"138-141\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-07-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2021 IEEE 21st International Conference on Nanotechnology (NANO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NANO51122.2021.9514353\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 IEEE 21st International Conference on Nanotechnology (NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANO51122.2021.9514353","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
mm-Wave Surface Acoustic Wave Filter based on Hexagonal Boron Nitride
We show that the operating frequency of surface acoustic wave filter can be significantly improved by adopting an emerging two-dimensional material: hexagonal boron nitride. Electromechanical properties estimated from first principles' analysis revealed that the material has the potential to realize RF filters in mm-Wave. The following piezoelectric simulation demonstrated an operation frequency as high as 36 GHz, which corresponds to Ka-band (from 26.5 to 40 GHz), with the insertion loss of 3 dB. This was achieved with the 150 nm period interdigital transducer on hexagonal boron nitride. Fabricating this scale of metal gratings is not very difficult with advanced lithography technology. As such, a low-power RF filter for 5G and beyond can be realized with the surface acoustic wave of hexagonal boron nitride.