{"title":"用于材料裁剪的反应等离子体物理学","authors":"Ryohei Itatani","doi":"10.1016/S1288-3255(99)80005-7","DOIUrl":null,"url":null,"abstract":"<div><p>Reactive plasmas, which can be used to manufacture highly functional composite materials and devices, have been discussed on the basis of plasma physics and gaseous electronics. To design plasma reactors suitable for specific processes, the relationship between control variables and plasma parameters has been discussed theoretically, and some methods for changing the parameters preferentially have been demonstrated.</p></div>","PeriodicalId":101031,"journal":{"name":"Plasmas & Ions","volume":"1 1","pages":"Pages 37-44"},"PeriodicalIF":0.0000,"publicationDate":"1998-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/S1288-3255(99)80005-7","citationCount":"7","resultStr":"{\"title\":\"Physics of reactive plasmas for material tailoring\",\"authors\":\"Ryohei Itatani\",\"doi\":\"10.1016/S1288-3255(99)80005-7\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Reactive plasmas, which can be used to manufacture highly functional composite materials and devices, have been discussed on the basis of plasma physics and gaseous electronics. To design plasma reactors suitable for specific processes, the relationship between control variables and plasma parameters has been discussed theoretically, and some methods for changing the parameters preferentially have been demonstrated.</p></div>\",\"PeriodicalId\":101031,\"journal\":{\"name\":\"Plasmas & Ions\",\"volume\":\"1 1\",\"pages\":\"Pages 37-44\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/S1288-3255(99)80005-7\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Plasmas & Ions\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S1288325599800057\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Plasmas & Ions","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1288325599800057","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Physics of reactive plasmas for material tailoring
Reactive plasmas, which can be used to manufacture highly functional composite materials and devices, have been discussed on the basis of plasma physics and gaseous electronics. To design plasma reactors suitable for specific processes, the relationship between control variables and plasma parameters has been discussed theoretically, and some methods for changing the parameters preferentially have been demonstrated.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
