无晶圆键合的双向刻蚀Woodpile光子晶体纳米腔

2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics Pub Date : 2009-10-30 DOI:10.1109/CLEOPR.2009.5292417

Lingling Tang, T. Yoshie

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引用次数: 0

摘要

在木桩光子晶体中，通过在完全光子带隙中沿波导调制单晶的大小，设计了紧凑的超高q模式。这些设计为简化木堆光子晶体纳米腔的制造提供了一种方法。设计的纳米空腔采用双向蚀刻方法制备，无需晶圆键合。

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Woodpile photonic crystal nanocavity by two-directional etching without wafer bonding

Compact ultra-high-Q modes are designed in a woodpile photonic crystal by mudulating unit cell size along a waveguide in a complete photonic band gap. These designs provide a means of simplifying the fabrication of woodpile photonic crystal nanocavities. The designed nanocavities are fabricated with a two-directional etching approach without wafer bonding.

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2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics

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