脉冲直流磁控溅射制备ZrAlN薄膜的微观结构、纳米力学和摩擦学性能

International Conference on Advanced Nanomaterials & Emerging Engineering Technologies Pub Date : 2013-07-24 DOI:10.1109/ICANMEET.2013.6609232

P. Kuppusami, Akash Singh, E. Mohandas

{"title":"脉冲直流磁控溅射制备ZrAlN薄膜的微观结构、纳米力学和摩擦学性能","authors":"P. Kuppusami, Akash Singh, E. Mohandas","doi":"10.1109/ICANMEET.2013.6609232","DOIUrl":null,"url":null,"abstract":"An investigation on the structural, nano-mechanical and tribological properties of thin films of ZrAlN deposited on (100) Si and D-9 alloy substrates prepared by pulsed DC magnetron is reported. Zr1-xAlxNy films have been studied with the Al concentration range of 0<;x<;0.36 Al. It was observed that values of hardness and Young's modulus of the alloyed ZrAlN films were in the range 9-18 GPa and 235-365 GPa, respectively. Tribological studies of ZrAlN thin film showed that the coefficient of friction of alloyed films of ZrAlN was lower for the steel ball (100Cr6 steel) than that for the Al2O3 ball up to 36 at.% of Al.","PeriodicalId":13708,"journal":{"name":"International Conference on Advanced Nanomaterials & Emerging Engineering Technologies","volume":"1 1","pages":"55-57"},"PeriodicalIF":0.0000,"publicationDate":"2013-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Microstructural, nanomechanical and tribological properties of ZrAlN thin films prepared by pulsed DC magnetron sputtering\",\"authors\":\"P. Kuppusami, Akash Singh, E. Mohandas\",\"doi\":\"10.1109/ICANMEET.2013.6609232\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An investigation on the structural, nano-mechanical and tribological properties of thin films of ZrAlN deposited on (100) Si and D-9 alloy substrates prepared by pulsed DC magnetron is reported. Zr1-xAlxNy films have been studied with the Al concentration range of 0<;x<;0.36 Al. It was observed that values of hardness and Young's modulus of the alloyed ZrAlN films were in the range 9-18 GPa and 235-365 GPa, respectively. Tribological studies of ZrAlN thin film showed that the coefficient of friction of alloyed films of ZrAlN was lower for the steel ball (100Cr6 steel) than that for the Al2O3 ball up to 36 at.% of Al.\",\"PeriodicalId\":13708,\"journal\":{\"name\":\"International Conference on Advanced Nanomaterials & Emerging Engineering Technologies\",\"volume\":\"1 1\",\"pages\":\"55-57\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-07-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Conference on Advanced Nanomaterials & Emerging Engineering Technologies\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICANMEET.2013.6609232\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Advanced Nanomaterials & Emerging Engineering Technologies","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICANMEET.2013.6609232","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

研究了用脉冲直流磁控管在(100)Si和D-9合金衬底上沉积ZrAlN薄膜的结构、纳米力学和摩擦学性能。对Al浓度范围为0<;x<;0.36 Al的Zr1-xAlxNy薄膜进行了研究，观察到合金ZrAlN薄膜的硬度和杨氏模量分别在9-18 GPa和235-365 GPa之间。ZrAlN薄膜的摩擦学研究表明，ZrAlN合金薄膜对钢球(100Cr6钢)的摩擦系数低于对Al2O3球的摩擦系数，最高可达36at。%的Al。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Microstructural, nanomechanical and tribological properties of ZrAlN thin films prepared by pulsed DC magnetron sputtering

An investigation on the structural, nano-mechanical and tribological properties of thin films of ZrAlN deposited on (100) Si and D-9 alloy substrates prepared by pulsed DC magnetron is reported. Zr1-xAlxNy films have been studied with the Al concentration range of 0<;x<;0.36 Al. It was observed that values of hardness and Young's modulus of the alloyed ZrAlN films were in the range 9-18 GPa and 235-365 GPa, respectively. Tribological studies of ZrAlN thin film showed that the coefficient of friction of alloyed films of ZrAlN was lower for the steel ball (100Cr6 steel) than that for the Al2O3 ball up to 36 at.% of Al.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

International Conference on Advanced Nanomaterials & Emerging Engineering Technologies

自引率

0.00%

发文量