脉冲直流磁控溅射制备ZrAlN薄膜的微观结构、纳米力学和摩擦学性能

International Conference on Advanced Nanomaterials & Emerging Engineering Technologies Pub Date : 2013-07-24 DOI:10.1109/ICANMEET.2013.6609232

P. Kuppusami, Akash Singh, E. Mohandas

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引用次数: 1

摘要

研究了用脉冲直流磁控管在(100)Si和D-9合金衬底上沉积ZrAlN薄膜的结构、纳米力学和摩擦学性能。对Al浓度范围为0<;x<;0.36 Al的Zr1-xAlxNy薄膜进行了研究，观察到合金ZrAlN薄膜的硬度和杨氏模量分别在9-18 GPa和235-365 GPa之间。ZrAlN薄膜的摩擦学研究表明，ZrAlN合金薄膜对钢球(100Cr6钢)的摩擦系数低于对Al2O3球的摩擦系数，最高可达36at。%的Al。

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Microstructural, nanomechanical and tribological properties of ZrAlN thin films prepared by pulsed DC magnetron sputtering

An investigation on the structural, nano-mechanical and tribological properties of thin films of ZrAlN deposited on (100) Si and D-9 alloy substrates prepared by pulsed DC magnetron is reported. Zr1-xAlxNy films have been studied with the Al concentration range of 0<;x<;0.36 Al. It was observed that values of hardness and Young's modulus of the alloyed ZrAlN films were in the range 9-18 GPa and 235-365 GPa, respectively. Tribological studies of ZrAlN thin film showed that the coefficient of friction of alloyed films of ZrAlN was lower for the steel ball (100Cr6 steel) than that for the Al2O3 ball up to 36 at.% of Al.

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International Conference on Advanced Nanomaterials & Emerging Engineering Technologies

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