用剥落技术制备柔性压阻传感器

2018 International Flexible Electronics Technology Conference (IFETC) Pub Date : 2018-08-01 DOI:10.1109/IFETC.2018.8583971

K. Sakuma, Huan Hu, S. Bedell, B. Webb, S. Wright, K. Latzko, M. Agno, J. Knickerbocker

{"title":"用剥落技术制备柔性压阻传感器","authors":"K. Sakuma, Huan Hu, S. Bedell, B. Webb, S. Wright, K. Latzko, M. Agno, J. Knickerbocker","doi":"10.1109/IFETC.2018.8583971","DOIUrl":null,"url":null,"abstract":"In this research study, we present comprehensive characterizations of flexible silicon sensors fabricated using controlled spalling which uses fracture to produce thin films of single-crystal silicon directly from a bulk substrate. We characterized the property of the thin silicon film for sensing strain and temperature. The flexible sensor exhibits high sensitivity with a temperature coefficient of resistance of −0.16/°C, which is desirable for targeted health monitoring applications.","PeriodicalId":6609,"journal":{"name":"2018 International Flexible Electronics Technology Conference (IFETC)","volume":"1 1","pages":"1-2"},"PeriodicalIF":0.0000,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Flexible Piezoresistive Sensors Fabricated by Spalling Technique\",\"authors\":\"K. Sakuma, Huan Hu, S. Bedell, B. Webb, S. Wright, K. Latzko, M. Agno, J. Knickerbocker\",\"doi\":\"10.1109/IFETC.2018.8583971\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this research study, we present comprehensive characterizations of flexible silicon sensors fabricated using controlled spalling which uses fracture to produce thin films of single-crystal silicon directly from a bulk substrate. We characterized the property of the thin silicon film for sensing strain and temperature. The flexible sensor exhibits high sensitivity with a temperature coefficient of resistance of −0.16/°C, which is desirable for targeted health monitoring applications.\",\"PeriodicalId\":6609,\"journal\":{\"name\":\"2018 International Flexible Electronics Technology Conference (IFETC)\",\"volume\":\"1 1\",\"pages\":\"1-2\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 International Flexible Electronics Technology Conference (IFETC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IFETC.2018.8583971\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 International Flexible Electronics Technology Conference (IFETC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IFETC.2018.8583971","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

在这项研究中，我们介绍了柔性硅传感器的综合特性，该传感器采用受控剥落制造，利用断裂直接从大块衬底上生产单晶硅薄膜。我们对硅薄膜的应变和温度传感性能进行了表征。柔性传感器具有高灵敏度，电阻温度系数为- 0.16/°C，这对于目标健康监测应用是理想的。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Flexible Piezoresistive Sensors Fabricated by Spalling Technique

In this research study, we present comprehensive characterizations of flexible silicon sensors fabricated using controlled spalling which uses fracture to produce thin films of single-crystal silicon directly from a bulk substrate. We characterized the property of the thin silicon film for sensing strain and temperature. The flexible sensor exhibits high sensitivity with a temperature coefficient of resistance of −0.16/°C, which is desirable for targeted health monitoring applications.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2018 International Flexible Electronics Technology Conference (IFETC)

自引率

0.00%

发文量