纳米结构涂层的MISSS能量和离子通量控制

2021 IEEE 11th International Conference Nanomaterials: Applications & Properties (NAP) Pub Date : 2021-09-05 DOI:10.1109/NAP51885.2021.9568535

A. Zykov, N. Yefymenko, V. Korneenkov, S. Dudin, S. Yakovin

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引用次数: 0

摘要

本文介绍了磁控管-离子源复合溅射系统(MISSS)的特点及其对磁控管放电离子源联合工作的影响，详细介绍了系统参数与气体压力、磁场强度和拓扑结构以及输入功率的依赖关系。给出了系统不同运行模式下粒子通量和离子能谱的空间分布。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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The Energy and Ion Flux Control in MISSS for Nanostructure Coating Synthesis

The paper presents characteristics of combined Magnetron-Ion-Source Sputtering System (MISSS) with impact on the joint operation of magnetron discharge the ion source giving detailed dependencies of the system parameters on gas pressure, magnetic field strength and topology, and input power. Spatial distribution of particle fluxes and ion energy spectra in different operating modes of the system are presented as well.

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2021 IEEE 11th International Conference Nanomaterials: Applications & Properties (NAP)

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