高泛音薄膜体声波压电谐振器的俘获厚度扩展模式

IF 1.3 4区物理与天体物理 Q4 PHYSICS, CONDENSED MATTER

Ferroelectrics Letters Section Pub Date : 2018-08-31 DOI:10.1080/07315171.2018.1499362

Jing Liu, Jianke Du, Ji Wang, Jia-shi Yang

{"title":"高泛音薄膜体声波压电谐振器的俘获厚度扩展模式","authors":"Jing Liu, Jianke Du, Ji Wang, Jia-shi Yang","doi":"10.1080/07315171.2018.1499362","DOIUrl":null,"url":null,"abstract":"Abstract We perform a theoretical analysis on thin film bulk acoustic wave piezoelectric resonators operating with high overtone thickness-extensional modes. The scalar differential equations by Tiersten and Stevens are used for the electroded and unelectroded parts of the resonator, respectively. An analytical solution is obtained for the free vibration of the resonator. Frequencies and modes are calculated based on the solution. Numerical results show that there exist modes with vibration mainly trapped under the driving electrode. The effects of the structural parameters on the behaviors of the trapping are examined.","PeriodicalId":50451,"journal":{"name":"Ferroelectrics Letters Section","volume":"20 1","pages":"38 - 48"},"PeriodicalIF":1.3000,"publicationDate":"2018-08-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Trapped thickness-extensional modes in high overtone thin film bulk acoustic wave piezoelectric resonators\",\"authors\":\"Jing Liu, Jianke Du, Ji Wang, Jia-shi Yang\",\"doi\":\"10.1080/07315171.2018.1499362\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Abstract We perform a theoretical analysis on thin film bulk acoustic wave piezoelectric resonators operating with high overtone thickness-extensional modes. The scalar differential equations by Tiersten and Stevens are used for the electroded and unelectroded parts of the resonator, respectively. An analytical solution is obtained for the free vibration of the resonator. Frequencies and modes are calculated based on the solution. Numerical results show that there exist modes with vibration mainly trapped under the driving electrode. The effects of the structural parameters on the behaviors of the trapping are examined.\",\"PeriodicalId\":50451,\"journal\":{\"name\":\"Ferroelectrics Letters Section\",\"volume\":\"20 1\",\"pages\":\"38 - 48\"},\"PeriodicalIF\":1.3000,\"publicationDate\":\"2018-08-31\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Ferroelectrics Letters Section\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1080/07315171.2018.1499362\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, CONDENSED MATTER\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Ferroelectrics Letters Section","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1080/07315171.2018.1499362","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}

引用次数: 3

摘要

摘要本文对工作在高泛音厚度-外延模式下的薄膜体声波压电谐振器进行了理论分析。Tiersten和Stevens的标量微分方程分别用于谐振器的带电部分和未带电部分。得到了谐振器自由振动的解析解。根据解计算频率和模态。数值结果表明，在驱动电极下存在主要被捕获的振动模态。研究了结构参数对俘获特性的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Trapped thickness-extensional modes in high overtone thin film bulk acoustic wave piezoelectric resonators

Abstract We perform a theoretical analysis on thin film bulk acoustic wave piezoelectric resonators operating with high overtone thickness-extensional modes. The scalar differential equations by Tiersten and Stevens are used for the electroded and unelectroded parts of the resonator, respectively. An analytical solution is obtained for the free vibration of the resonator. Frequencies and modes are calculated based on the solution. Numerical results show that there exist modes with vibration mainly trapped under the driving electrode. The effects of the structural parameters on the behaviors of the trapping are examined.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Ferroelectrics Letters Section 物理-物理：凝聚态物理

CiteScore

1.10

自引率

0.00%

发文量

审稿时长

4.8 months

期刊介绍： Ferroelectrics Letters is a separately published section of the international journal Ferroelectrics. Both sections publish theoretical, experimental and applied papers on ferroelectrics and related materials, including ferroelastics, ferroelectric ferromagnetics, electrooptics, piezoelectrics, pyroelectrics, nonlinear dielectrics, polymers and liquid crystals. Ferroelectrics Letters permits the rapid publication of important, quality, short original papers on the theory, synthesis, properties and applications of ferroelectrics and related materials.