ALD沉积的非晶氧化铝涂层可以减缓玻璃蚀变

IF 0.3 4区 材料科学 Q4 CHEMISTRY, PHYSICAL
M. Hiebert, Jamie L. Weaver, T. Lam, N. Little, Ethan Hyde, E. Vicenzi, R. Phaneuf
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引用次数: 0

摘要

研究了原子层沉积(ALD)非晶氧化铝和氧化钛涂层在降低硅酸盐玻璃蚀变率方面的应用。通过对高温浸泡蚀变实验所得渗滤液的质谱分析发现,与未涂覆玻璃相比,涂覆ALD后玻璃中Na和Si的释放浓度明显降低。这种减少与ALD涂层提出的保护作用是一致的。此外,视觉观察表明,浸入式未镀膜玻璃形成了大量无定形的二次相沉积物。这种沉积物不存在于ALD涂层和改变玻璃样品的溶液中。然而,ALD涂层在长时间浸泡后确实分层,这可能是ALD涂层效果的限制因素。这一限制可以通过改进ALD涂层工艺得到缓解。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
ALD deposited amorphous alumina coatings can slow glass alteration
Atomic layer deposited (ALD) amorphous aluminium oxide and titanium oxide coatings have been investigated for use in reducing the rate of silicate glass alteration. Mass spectrometric analysis of leachate from elevated temperature aqueous immersion alteration experiments showed a marked decrease in the concentration of released Na and Si from the glass when the vitrified material was ALD coated as compared to uncoated glass. This decrease is consistent with the proposed protective effect of the ALD coating. Additionally, visual observations indicate formation of significant amounts of amorphous, secondary phase sediment for immersed, uncoated glass. This sediment was not present in the solution of the ALD coated and altered glass samples. However, the ALD coating did delaminate after protracted immersion, a likely limiting factor of the efficacy of ALD coatings. This limitation may be mitigated through a proposed refinement of the ALD coating procedure.
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来源期刊
CiteScore
0.70
自引率
33.30%
发文量
0
审稿时长
1 months
期刊介绍: Physics and Chemistry of Glasses accepts papers of a more purely scientific interest concerned with glasses and their structure or properties. Thus the subject of a paper will normally determine the journal in which it will be published.
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