{"title":"不同测量技术对ZnO薄膜光带边缘的比较研究","authors":"Feng Li, Zhongquan Ma, Ling Shen, Bo He","doi":"10.1109/SOPO.2009.5230095","DOIUrl":null,"url":null,"abstract":"ZnO films were prepared by radio frequency (rf) magnetron sputtering. The absorption coefficients as a function of incident photon energy were obtained by means of spectroscopic ellipsometer (SE), as well as by using transmission and reflection measurement (T&R). The optical absorption band gap decided by SE is 3.32 eV, while that decided by T&R is 3.26 eV. The difference is ascribed to the fact that SE probes only the surface of films whereas the T&R measurement probes the bulk of the films. The same fact can also be used to explain that, at optical band edge region, the absorption coefficient decided by SE is lower than that decided by T&R. When the incident photon energy is larger than the optical band gap, exitonic transitions in the bulk of the films are used to discuss the change of the absorption coefficient vs. incident photon energy.","PeriodicalId":6416,"journal":{"name":"2009 Symposium on Photonics and Optoelectronics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2009-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Comparative Study on the Optical Band Edge of ZnO Films with Different Measurement Techniques\",\"authors\":\"Feng Li, Zhongquan Ma, Ling Shen, Bo He\",\"doi\":\"10.1109/SOPO.2009.5230095\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"ZnO films were prepared by radio frequency (rf) magnetron sputtering. The absorption coefficients as a function of incident photon energy were obtained by means of spectroscopic ellipsometer (SE), as well as by using transmission and reflection measurement (T&R). The optical absorption band gap decided by SE is 3.32 eV, while that decided by T&R is 3.26 eV. The difference is ascribed to the fact that SE probes only the surface of films whereas the T&R measurement probes the bulk of the films. The same fact can also be used to explain that, at optical band edge region, the absorption coefficient decided by SE is lower than that decided by T&R. When the incident photon energy is larger than the optical band gap, exitonic transitions in the bulk of the films are used to discuss the change of the absorption coefficient vs. incident photon energy.\",\"PeriodicalId\":6416,\"journal\":{\"name\":\"2009 Symposium on Photonics and Optoelectronics\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 Symposium on Photonics and Optoelectronics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SOPO.2009.5230095\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 Symposium on Photonics and Optoelectronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SOPO.2009.5230095","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Comparative Study on the Optical Band Edge of ZnO Films with Different Measurement Techniques
ZnO films were prepared by radio frequency (rf) magnetron sputtering. The absorption coefficients as a function of incident photon energy were obtained by means of spectroscopic ellipsometer (SE), as well as by using transmission and reflection measurement (T&R). The optical absorption band gap decided by SE is 3.32 eV, while that decided by T&R is 3.26 eV. The difference is ascribed to the fact that SE probes only the surface of films whereas the T&R measurement probes the bulk of the films. The same fact can also be used to explain that, at optical band edge region, the absorption coefficient decided by SE is lower than that decided by T&R. When the incident photon energy is larger than the optical band gap, exitonic transitions in the bulk of the films are used to discuss the change of the absorption coefficient vs. incident photon energy.
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