固态气体传感器中的导电

Julian W. Gardner
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引用次数: 44

摘要

在过去的二十年里,金属氧化物半导体的气敏特性得到了广泛的研究。最近,它们在差分气体传感器阵列中的应用以及与元胞自动机和神经网络方法的关联重新引起了人们的兴趣。考虑了多孔厚膜半导体气体传感器的电导率与其物理和几何性质之间的扩散分析模型。推导了几种结构的传感元件的理论响应,并与氧化锡传感器暴露于简单醇的实验数据进行了比较。在低气体浓度(50 ppm)下得到的结果与基本模型的预测基本一致;但是,在较高的气体浓度(50 ppm)下,模型需要考虑气体扩散率对浓度的依赖关系。考虑了传感器设计变化对响应的影响,当电极位于半导体表面以下的距离等于电极间距时,获得了最佳共面电极配置。因此,使用完全开发的分析模型可能会导致传感器设计的改进和模式识别技术中目前使用的决策标准的修改。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Electrical conduction in solid-state gas sensors

The gas-sensing properties of metal-oxide semiconductors have been studied extensively over the past twenty years. There has been renewed interest recently in their application in differential gas sensor arrays and the association with cellular automata and neural networking methods. A diffusion-based analytical model is considered that relates the electrical conductance of a porous thick-film semiconductor gas sensor to its physical and geometrical properties. The theoretical responses of sensing elements with several configurations have been derived, and compared with experimental data on tin-oxide sensors exposed to simple alcohols. The results obtained broadly agree with the predictions of the basic model at low gas concentrations (<50 ppm); but, at higher gas concentrations (>50 ppm), the model needs to incorporate a dependence of the gas diffusivity upon concentration.

The effect of changes in sensor design on the response is considered, and the optimum coplanar electrode configuration is obtained when the electrodes lie a distance equal to the electrode separation below the semiconductor surface. Thus, the use of a fully-developed analytical model may well lead to improvements in sensor design and to modifications in the decision criteria currently utilized in pattern recognition techniques.

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