{"title":"脉冲激光沉积制备高质量复合氧化物薄膜","authors":"T. Ohnishi","doi":"10.1380/jsssj.38.216","DOIUrl":null,"url":null,"abstract":"Reproducible way to grow high quality complex oxide thin films by means of pulsed laser deposition is addressed. Laser ablation conditions are the most essential ones to be controlled precisely because it directly relates to cation ratio of deposited thin films. In some specific case, substrate temperature and gas pressure also become important to control the film composition. Film quality is tightly correlated to the thin film stoichiometry.","PeriodicalId":13075,"journal":{"name":"Hyomen Kagaku","volume":"14 1","pages":"216-221"},"PeriodicalIF":0.0000,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Synthesis of High Quality Complex Oxide Thin Films by Pulsed Laser Deposition\",\"authors\":\"T. Ohnishi\",\"doi\":\"10.1380/jsssj.38.216\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Reproducible way to grow high quality complex oxide thin films by means of pulsed laser deposition is addressed. Laser ablation conditions are the most essential ones to be controlled precisely because it directly relates to cation ratio of deposited thin films. In some specific case, substrate temperature and gas pressure also become important to control the film composition. Film quality is tightly correlated to the thin film stoichiometry.\",\"PeriodicalId\":13075,\"journal\":{\"name\":\"Hyomen Kagaku\",\"volume\":\"14 1\",\"pages\":\"216-221\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Hyomen Kagaku\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1380/jsssj.38.216\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Hyomen Kagaku","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1380/jsssj.38.216","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Synthesis of High Quality Complex Oxide Thin Films by Pulsed Laser Deposition
Reproducible way to grow high quality complex oxide thin films by means of pulsed laser deposition is addressed. Laser ablation conditions are the most essential ones to be controlled precisely because it directly relates to cation ratio of deposited thin films. In some specific case, substrate temperature and gas pressure also become important to control the film composition. Film quality is tightly correlated to the thin film stoichiometry.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
