硅光子学集成器件高通量晶圆级测试的实际考虑

K. McLean, Calvin Ma, S. Roy, Fen Guan, H. Ding, Bart Green
{"title":"硅光子学集成器件高通量晶圆级测试的实际考虑","authors":"K. McLean, Calvin Ma, S. Roy, Fen Guan, H. Ding, Bart Green","doi":"10.1109/ASMC49169.2020.9185375","DOIUrl":null,"url":null,"abstract":"Optical communication has recently seen a resurgence driven by the demand for high-speed networking. Silicon Photonics (SiPh) has gained recent interest as a low cost and high volume method for creating photonic integrated circuits (PIC). PICs create new challenges for manufacturability since the devices require optical probing in addition to RF probing. This paper discusses a low cost method for aligning an optical fiber to a vertical grating coupler for wafer optical probing using a pre-defined device layout. This method is suitable for high volume wafer manufacturing. The alignment takes 0.5-1.5s and is reliable across multiple products and designs.","PeriodicalId":6771,"journal":{"name":"2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","volume":"8 1","pages":"1-6"},"PeriodicalIF":0.0000,"publicationDate":"2020-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Practical considerations for high throughput wafer level tests of silicon-photonics integrated devices\",\"authors\":\"K. McLean, Calvin Ma, S. Roy, Fen Guan, H. Ding, Bart Green\",\"doi\":\"10.1109/ASMC49169.2020.9185375\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Optical communication has recently seen a resurgence driven by the demand for high-speed networking. Silicon Photonics (SiPh) has gained recent interest as a low cost and high volume method for creating photonic integrated circuits (PIC). PICs create new challenges for manufacturability since the devices require optical probing in addition to RF probing. This paper discusses a low cost method for aligning an optical fiber to a vertical grating coupler for wafer optical probing using a pre-defined device layout. This method is suitable for high volume wafer manufacturing. The alignment takes 0.5-1.5s and is reliable across multiple products and designs.\",\"PeriodicalId\":6771,\"journal\":{\"name\":\"2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)\",\"volume\":\"8 1\",\"pages\":\"1-6\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ASMC49169.2020.9185375\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASMC49169.2020.9185375","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

由于对高速网络的需求,光通信最近出现了复苏。硅光子学(SiPh)作为一种制造光子集成电路(PIC)的低成本和高容量方法,近年来引起了人们的兴趣。pic为可制造性带来了新的挑战,因为器件除了需要射频探测外还需要光学探测。本文讨论了一种低成本的方法,使光纤对准垂直光栅耦合器的晶圆光探测使用预先定义的器件布局。该方法适用于大批量晶圆制造。校准时间为0.5-1.5s,在多种产品和设计中都是可靠的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Practical considerations for high throughput wafer level tests of silicon-photonics integrated devices
Optical communication has recently seen a resurgence driven by the demand for high-speed networking. Silicon Photonics (SiPh) has gained recent interest as a low cost and high volume method for creating photonic integrated circuits (PIC). PICs create new challenges for manufacturability since the devices require optical probing in addition to RF probing. This paper discusses a low cost method for aligning an optical fiber to a vertical grating coupler for wafer optical probing using a pre-defined device layout. This method is suitable for high volume wafer manufacturing. The alignment takes 0.5-1.5s and is reliable across multiple products and designs.
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