利用微球玻璃壳低语走廊模式谐振器进行皮米级尺寸传感

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Pub Date : 2021-06-20 DOI:10.1109/Transducers50396.2021.9495496

Vedant Sumaria, S. Tadigadapa

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引用次数: 0

摘要

我们提出了使用高质量因子(Q)耳语通道模式(WGM)硼硅玻璃微球谐振器进行亚皮米位移测量。利用激光多普勒振动计(LDV)校准WGM谐振器在吸收热辐射时的膨胀，使用直径为1 mm、厚度为8.4\ \mu \mathrm{m}$的玻璃微球壳谐振器可以实验分辨3.7 pm的尺寸变化。所提出的COMSOL模型表明，对于直径为2mm，厚度为$2\ \mu \ mathm {m}$的微球壳谐振器，可以实现前所未有的89 fm的位移分辨率。

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Picometer Level Dimensional Sensing Using Microspherical Glass Shell Whispering Gallery Mode Resonators

We present sub-picometer displacement measurement using a high quality-factor (Q) whispering gallery mode (WGM) borosilicate glass microspherical resonators. Calibrating the expansion of the WGM resonator using a laser Doppler vibrometer (LDV) upon absorption of thermal radiation, 3.7 pm of dimensional change can be experimentally resolved using a 1 mm diameter and $8.4\ \mu \mathrm{m}$ thick glass microspherical shell resonator. COMSOL models presented show that an unprecedented displacement resolution of 89 fm is possible for a microspherical shell resonator with a diameter of 2 mm and a thickness of $2\ \mu \mathrm{m}$.

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2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

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