提高了ZnO薄膜在Au纳米颗粒/p-Si上的生长质量

E. Gur, A. Baltakesmez, S. Tuzemen, Adem Yenisoy
{"title":"提高了ZnO薄膜在Au纳米颗粒/p-Si上的生长质量","authors":"E. Gur, A. Baltakesmez, S. Tuzemen, Adem Yenisoy","doi":"10.1109/RSM.2015.7355031","DOIUrl":null,"url":null,"abstract":"In this study, gold thin films were grown 5 nm, 10nm, 20nm thicknesses on quartz substrate by thermal evaporation. In order to obtain Au nanoparticle films were annealed 3h and 6h at 600 °C or 800 °C in nitrogen atmosphere. After annealing gold nanoparticles were obtained varying in sizes averaged between 12-230 nm. Absorption in shift between 500nm-750nm has been observed. Au gold nanoparticles were also grown on p-Si substrate. ZnO thin films were grown by electrochemically on both gold nanoparticle/p-Si and reference pSi substrates. Characterizations of the ZnO thin films has shown that the thin films grown on Au nanoparticles has better crystal orientation, bigger grain sizes and higher absorption coefficient and device performance.","PeriodicalId":6667,"journal":{"name":"2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)","volume":"19 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2015-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Improved growth quality of the ZnO thin films on Au nano-particles/p-Si\",\"authors\":\"E. Gur, A. Baltakesmez, S. Tuzemen, Adem Yenisoy\",\"doi\":\"10.1109/RSM.2015.7355031\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this study, gold thin films were grown 5 nm, 10nm, 20nm thicknesses on quartz substrate by thermal evaporation. In order to obtain Au nanoparticle films were annealed 3h and 6h at 600 °C or 800 °C in nitrogen atmosphere. After annealing gold nanoparticles were obtained varying in sizes averaged between 12-230 nm. Absorption in shift between 500nm-750nm has been observed. Au gold nanoparticles were also grown on p-Si substrate. ZnO thin films were grown by electrochemically on both gold nanoparticle/p-Si and reference pSi substrates. Characterizations of the ZnO thin films has shown that the thin films grown on Au nanoparticles has better crystal orientation, bigger grain sizes and higher absorption coefficient and device performance.\",\"PeriodicalId\":6667,\"journal\":{\"name\":\"2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)\",\"volume\":\"19 1\",\"pages\":\"1-4\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/RSM.2015.7355031\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/RSM.2015.7355031","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

摘要

本研究采用热蒸发法在石英衬底上分别生长了5 nm、10nm、20nm厚度的金薄膜。为了获得金纳米颗粒,将膜在600℃或800℃氮气气氛中分别退火3h和6h。退火后得到的金纳米颗粒大小不等,平均在12-230 nm之间。在500nm-750nm之间的位移中观察到吸收。在p-Si衬底上也生长出了金纳米颗粒。采用电化学方法在金纳米颗粒/p-Si和参考pSi衬底上生长ZnO薄膜。对ZnO薄膜的表征表明,在Au纳米颗粒上生长的ZnO薄膜具有更好的晶体取向、更大的晶粒尺寸、更高的吸收系数和器件性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Improved growth quality of the ZnO thin films on Au nano-particles/p-Si
In this study, gold thin films were grown 5 nm, 10nm, 20nm thicknesses on quartz substrate by thermal evaporation. In order to obtain Au nanoparticle films were annealed 3h and 6h at 600 °C or 800 °C in nitrogen atmosphere. After annealing gold nanoparticles were obtained varying in sizes averaged between 12-230 nm. Absorption in shift between 500nm-750nm has been observed. Au gold nanoparticles were also grown on p-Si substrate. ZnO thin films were grown by electrochemically on both gold nanoparticle/p-Si and reference pSi substrates. Characterizations of the ZnO thin films has shown that the thin films grown on Au nanoparticles has better crystal orientation, bigger grain sizes and higher absorption coefficient and device performance.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信