一种新型无线无源Love波冰传感器的研制

Yining Yin, Wen Wang, Yana Jia, Yong Liang
{"title":"一种新型无线无源Love波冰传感器的研制","authors":"Yining Yin, Wen Wang, Yana Jia, Yong Liang","doi":"10.1109/ULTSYM.2019.8926145","DOIUrl":null,"url":null,"abstract":"a novel configuration of wireless and passive Love wave based ice sensing device employing waveguide structure of SiO2/36°YX LiTaO3 with high mass sensitivity and excellent temperature stability was presented in this work. A reflective delay line consists of a transducer and three reflectors on 36° YX LiTaO3 substrate with SiO2 guiding layer was developed as the sensor element. Prior to sensing device development, the coupling of modes (COM) modeling was performed to device simulation. Using the typical lithography technology, the sensing device was developed at 433 MHz, and packaged with a permeable film. Using the experimental setup composed of a high-low temperature chamber, wireless transceiver module and sensing device, the response in time domain of the developed sensing device was characterized. The mass loading effect in icing process modulates the propagation of Love wave, resulting in the corresponding phase response shift. By wireless measurement, the phase change from water to ice was detected, and the measured results addressed the feasibility and effectiveness of the proposed wireless and passive Love wave ice sensor.","PeriodicalId":6759,"journal":{"name":"2019 IEEE International Ultrasonics Symposium (IUS)","volume":"11 1","pages":"2553-2556"},"PeriodicalIF":0.0000,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Development of a novel wireless and passive Love wave based ice sensor\",\"authors\":\"Yining Yin, Wen Wang, Yana Jia, Yong Liang\",\"doi\":\"10.1109/ULTSYM.2019.8926145\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"a novel configuration of wireless and passive Love wave based ice sensing device employing waveguide structure of SiO2/36°YX LiTaO3 with high mass sensitivity and excellent temperature stability was presented in this work. A reflective delay line consists of a transducer and three reflectors on 36° YX LiTaO3 substrate with SiO2 guiding layer was developed as the sensor element. Prior to sensing device development, the coupling of modes (COM) modeling was performed to device simulation. Using the typical lithography technology, the sensing device was developed at 433 MHz, and packaged with a permeable film. Using the experimental setup composed of a high-low temperature chamber, wireless transceiver module and sensing device, the response in time domain of the developed sensing device was characterized. The mass loading effect in icing process modulates the propagation of Love wave, resulting in the corresponding phase response shift. By wireless measurement, the phase change from water to ice was detected, and the measured results addressed the feasibility and effectiveness of the proposed wireless and passive Love wave ice sensor.\",\"PeriodicalId\":6759,\"journal\":{\"name\":\"2019 IEEE International Ultrasonics Symposium (IUS)\",\"volume\":\"11 1\",\"pages\":\"2553-2556\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 IEEE International Ultrasonics Symposium (IUS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ULTSYM.2019.8926145\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE International Ultrasonics Symposium (IUS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.2019.8926145","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

采用具有高质量灵敏度和良好温度稳定性的SiO2/36°YX LiTaO3波导结构,提出了一种新型的无线无源Love波冰传感装置。在36°YX LiTaO3衬底上设计了一种由一个换能器和三个反射器组成的反射延迟线,该延迟线的传感器元件为SiO2导向层。在传感器件开发之前,对器件仿真进行了模式耦合(COM)建模。采用典型的光刻技术,在433兆赫下开发了传感装置,并采用可渗透薄膜封装。利用由高低温室、无线收发模块和传感装置组成的实验装置,对所研制的传感装置的时域响应进行了表征。结冰过程中的质量加载效应对Love波的传播产生调制作用,导致Love波的相移。通过无线测量,检测了水到冰的相变,测量结果验证了无线无源Love波冰传感器的可行性和有效性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development of a novel wireless and passive Love wave based ice sensor
a novel configuration of wireless and passive Love wave based ice sensing device employing waveguide structure of SiO2/36°YX LiTaO3 with high mass sensitivity and excellent temperature stability was presented in this work. A reflective delay line consists of a transducer and three reflectors on 36° YX LiTaO3 substrate with SiO2 guiding layer was developed as the sensor element. Prior to sensing device development, the coupling of modes (COM) modeling was performed to device simulation. Using the typical lithography technology, the sensing device was developed at 433 MHz, and packaged with a permeable film. Using the experimental setup composed of a high-low temperature chamber, wireless transceiver module and sensing device, the response in time domain of the developed sensing device was characterized. The mass loading effect in icing process modulates the propagation of Love wave, resulting in the corresponding phase response shift. By wireless measurement, the phase change from water to ice was detected, and the measured results addressed the feasibility and effectiveness of the proposed wireless and passive Love wave ice sensor.
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