用于监测可燃气体浓度的厚膜量热传感器

Aifan Chen, Ruixian Luo, Thiam-Chye Tan, Chung-Chiun Liu
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引用次数: 13

摘要

采用厚膜金属化工艺制备了一种由两层相同铂加热器/电阻温度计膜组成的量热传感器,用于监测流动反应器中氢气、一氧化碳和碳氢化合物气体的稳态浓度。铂黑和钯用作催化剂,通过化学或电解方式沉积在其中一层铂膜上,而另一层作为补偿元件。实验研究表明,用该工艺制作的传感器对被测可燃气体具有良好的传感特性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A thick-film calormetric sensor for monitoring the concentration of combustible gases

A calorimetric sensor consisting of two identical platinum heater/ resistance thermometer films fabricated by a thick-film metallization process is used to monitor the steady-state concentration of hydrogen, carbon monoxide and hydrocarbon gases in a flow reactor. Platinum black and palladium are used as catalysts and are deposited either chemically or electrolytically on one of the platinum films, while the other serves as a compensating element. Experimental studies show that the sensors fabricated by this process have good sensing characteristics for the combustible gases examined.

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