用于短毫米波和太赫兹行波管窗口的相对较薄的金刚石薄膜的制备

IEEE International Vacuum Electronics Conference. International Vacuum Electronics Conference Pub Date : 2014-04-22 DOI:10.1109/IVEC.2014.6857689

M. Ding, Lili Li, Jinjun Feng

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引用次数: 0

摘要

为了提高用于短毫米波和太赫兹行波管窗口的相对较薄的金刚石薄膜的力学性能，我们提出了一种新的制造工艺，在传统的多晶金刚石(PCD)沉积中加入超纳米金刚石(UNCD)工艺。本文介绍了金刚石复合膜的制备方法、在PCD上生长UNCD的过程以及复合膜断裂强度的提高。

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Fabrication of relatively thin diamond films for short mm wave and THz TWT windows

To improve mechanical properties of relatively thin diamond films used in short mm wave and THz TWT windows, we propose a novel fabrication process, in which an ultra-nanocrystalline diamond (UNCD) process is incorporated into the conventional polycrystalline diamond (PCD) deposition. This paper describes the fabrication method, growing process of UNCD on PCD and improvement in fracture strength of the composite diamond films.

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IEEE International Vacuum Electronics Conference. International Vacuum Electronics Conference

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