二维层状过渡金属二硫族化合物的外延生长

IF 10.6 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY
T. Choudhury, Xiaotian Zhang, Zakaria Y. Al Balushi, M. Chubarov, J. Redwing
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引用次数: 41

摘要

过渡金属二硫化物(TMD)单层和异质结构已经成为一类引人注目的具有转化特性的材料,可以用于新型器件技术。这些材料通常是通过从大块晶体中剥离薄片来制造的,但是单晶薄膜的晶圆级外延需要推进该领域。本文综述了TMD薄膜中范德华键结晶体外延生长的基本方面。首先描述了TMD晶体的结构和电子特性,以及气相沉积的来源和方法。对TMD外延的具体问题进行了严格的审查,包括衬底性质和薄膜-衬底取向和键合。讨论了不同衬底上TMD外延的现状以及大面积外延薄膜的表征技术。提出了未来的发展方向,包括衬底、原位和全晶圆表征技术以及异质结构生长。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Epitaxial Growth of Two-Dimensional Layered Transition Metal Dichalcogenides
Transition metal dichalcogenide (TMD) monolayers and heterostructures have emerged as a compelling class of materials with transformative properties that may be harnessed for novel device technologies. These materials are commonly fabricated by exfoliation of flakes from bulk crystals, but wafer-scale epitaxy of single-crystal films is required to advance the field. This article reviews the fundamental aspects of epitaxial growth of van der Waals–bonded crystals specific to TMD films. The structural and electronic properties of TMD crystals are initially described along with sources and methods used for vapor phase deposition. Issues specific to TMD epitaxy are critically reviewed, including substrate properties and film-substrate orientation and bonding. The current status of TMD epitaxy on different substrate types is discussed along with characterization techniques for large-areaepitaxial films. Future directions are proposed, including developments in substrates, in situ and full-wafer characterization techniques, and heterostructure growth.
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来源期刊
Annual Review of Materials Research
Annual Review of Materials Research 工程技术-材料科学:综合
CiteScore
17.70
自引率
1.00%
发文量
21
期刊介绍: The Annual Review of Materials Research, published since 1971, is a journal that covers significant developments in the field of materials research. It includes original methodologies, materials phenomena, material systems, and special keynote topics. The current volume of the journal has been converted from gated to open access through Annual Reviews' Subscribe to Open program, with all articles published under a CC BY license. The journal defines its scope as encompassing significant developments in materials science, including methodologies for studying materials and materials phenomena. It is indexed and abstracted in various databases, such as Scopus, Science Citation Index Expanded, Civil Engineering Abstracts, INSPEC, and Academic Search, among others.
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