射流气相沉积制备层状纳米复合材料

H.N.G. Wadley, L.M. Hsiung, R.L. Lankey
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引用次数: 8

摘要

新型射流气相沉积(JVD)工艺为廉价合成功能梯度(复合)材料(fgm)提供了可观的前景。本文研究了用JVD工艺制备的Al/Cu金属-金属体系模型和Al/Al203金属-金属氧化物多层纳米复合材料体系的微观结构-力学性能关系。在衬底温度为~ 140℃的条件下,将10μm厚的AlCu多层膜沉积在硅片上。A1和Cu层的厚度大致相等,厚度从~ 20 nm到~ 1000 nm不等。在~ 250℃的温度下,将20μm厚的rmAlAl2O3多层膜沉积在玻片上。氧化层厚度保持在~ 2-6 nm范围内,而铝层厚度系统地从~ 3到~ 50 nm变化。Al/Cu多层膜为多晶结构,具有较强的织构[111],而Al/Al2O3多层膜由无定形氧化铝层和晶粒取向随机的多晶金属层组成。当层间距超过~ 50 nm时,Al/Cu多层膜的屈服强度与层厚度呈反比关系。当AlCu层间距小于~ 50 nm时,Koehler图像力模型可以更好地预测强度。在Al/Al2O3多层材料中也发现了类似的现象。在这种情况下,从Orowan型行为到Koehler型行为转变的临界金属层厚度约为25 nm。这与理论预测一致,理论预测表明,低模量一致性的临界层厚度随着两个组成层之间剪切模量差异的增加而减小。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Artificially layered nanocomposites fabricated by jet vapor deposition

Novel jet vapor deposition (JVD) processes offer considerable promise for the inexpensive synthesis of functionally graded (composite) materials (FGMs). Here, we explore microstructure-mechanical property relationships for a model Al/Cu metal-metal system and an Al/Al203 metal-metal oxide multilayered nanocomposite system fabricated by the JVD process. The 10μm thick AlCu multilayers were deposited on silicon wafers at a substrate temperature of ∼140°C. The A1 and Cu layers were of approximately equal thickness and were systematically varied from ∼20 to ∼1000 nm. The 20μm thick rmAlAl2O3 multilayers were deposited on glass slides at ∼250°C. The oxide layer thickness was held constant in the ∼2–6 nm range, whilst the Al layer thickness was systematically varied from ∼3 to ∼50 nm. The structure of the Al/Cu multilayers was polycrystalline and had a strong [111] texture, whereas the Al/Al2O3 multilayers consisted of amorphous aluminum oxide layers and polycrystalline metal layers with randomly oriented grains. The yield strength of the Al/Cu multilayers exhibited an inverse dependence upon layer thickness when the layer spacing exceeded ∼50 nm. When the AlCu layer spacing was thinner than ∼50 nm, the strength was better predicted by a Koehler image force model. A similar phenomenon was also found in the Al/Al2O3 multilayers. In this case the critical metal layer thickness for the transition from an Orowan to a Koehler type behavior was approximately 25 nm. This is consistent with theoretical predictions which indicate that the critical layer thickness of the low modulus consistuent decreases as the difference in shear moduli between the two constituent layers increases.

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