利用各种反馈控制方案评估半导体制造洁净室室内温度和能耗的瞬态响应

{"title":"利用各种反馈控制方案评估半导体制造洁净室室内温度和能耗的瞬态响应","authors":"Geun-Soo Song, Jun-Soo Jung, Chun-Sik Kim, Ji-Seok Yang, Kun-hyung Lee, Kyung-Hoon Yoo","doi":"10.3795/ksme-b.2023.47.5.281","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":43823,"journal":{"name":"Transactions of the Korean Society of Mechanical Engineers B","volume":"9 1","pages":""},"PeriodicalIF":0.2000,"publicationDate":"2023-05-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Assessment of Transient Response of Indoor Temperature and Energy Consumption in a Semiconductor Manufacturing Cleanroom Using Various Feedback Control Schemes\",\"authors\":\"Geun-Soo Song, Jun-Soo Jung, Chun-Sik Kim, Ji-Seok Yang, Kun-hyung Lee, Kyung-Hoon Yoo\",\"doi\":\"10.3795/ksme-b.2023.47.5.281\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":43823,\"journal\":{\"name\":\"Transactions of the Korean Society of Mechanical Engineers B\",\"volume\":\"9 1\",\"pages\":\"\"},\"PeriodicalIF\":0.2000,\"publicationDate\":\"2023-05-31\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Transactions of the Korean Society of Mechanical Engineers B\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.3795/ksme-b.2023.47.5.281\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"ENGINEERING, MECHANICAL\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Transactions of the Korean Society of Mechanical Engineers B","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.3795/ksme-b.2023.47.5.281","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"ENGINEERING, MECHANICAL","Score":null,"Total":0}