一种新型环保的化学镀铜浴

International Conference on Green technology and environmental Conservation (GTEC-2011) Pub Date : 2011-12-01 DOI:10.1109/GTEC.2011.6167666

S. Rekha, K. Srinvasan

{"title":"一种新型环保的化学镀铜浴","authors":"S. Rekha, K. Srinvasan","doi":"10.1109/GTEC.2011.6167666","DOIUrl":null,"url":null,"abstract":"Methane sulphonic acid is most promising eco friendly acid replacing highly polluting acids like HF. In this study a novel eco friendly electroless copper methane sulphonate bath has been developed. The source material is copper methane sulphonate, which has high solubility, EDTA as chelating agent, glyoxylic acid as chelating agent and NaOH is used as a pH adjuster. The bath is optimized for the parameters affecting the rate of deposition. SEM studies shows refined grain size and thus a promising eco-friendly bath is developed.","PeriodicalId":13706,"journal":{"name":"International Conference on Green technology and environmental Conservation (GTEC-2011)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2011-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A novel eco-friendly bath for electroless copper deposition\",\"authors\":\"S. Rekha, K. Srinvasan\",\"doi\":\"10.1109/GTEC.2011.6167666\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Methane sulphonic acid is most promising eco friendly acid replacing highly polluting acids like HF. In this study a novel eco friendly electroless copper methane sulphonate bath has been developed. The source material is copper methane sulphonate, which has high solubility, EDTA as chelating agent, glyoxylic acid as chelating agent and NaOH is used as a pH adjuster. The bath is optimized for the parameters affecting the rate of deposition. SEM studies shows refined grain size and thus a promising eco-friendly bath is developed.\",\"PeriodicalId\":13706,\"journal\":{\"name\":\"International Conference on Green technology and environmental Conservation (GTEC-2011)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Conference on Green technology and environmental Conservation (GTEC-2011)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/GTEC.2011.6167666\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Green technology and environmental Conservation (GTEC-2011)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/GTEC.2011.6167666","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

甲烷磺酸是取代氟化氢等高污染酸的最有前途的环保酸。本研究开发了一种新型的环保甲烷磺酸铜化学镀液。原料为高溶解度的甲烷磺酸铜，以EDTA为螯合剂，乙醛酸为螯合剂，NaOH为pH调节剂。浴槽对影响沉积速率的参数进行了优化。扫描电镜研究显示晶粒细化，从而开发出一种有前途的环保浴。

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A novel eco-friendly bath for electroless copper deposition

Methane sulphonic acid is most promising eco friendly acid replacing highly polluting acids like HF. In this study a novel eco friendly electroless copper methane sulphonate bath has been developed. The source material is copper methane sulphonate, which has high solubility, EDTA as chelating agent, glyoxylic acid as chelating agent and NaOH is used as a pH adjuster. The bath is optimized for the parameters affecting the rate of deposition. SEM studies shows refined grain size and thus a promising eco-friendly bath is developed.

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International Conference on Green technology and environmental Conservation (GTEC-2011)

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