电容耦合等离子体中的随机加热

2008 IEEE 35th International Conference on Plasma Science Pub Date : 2008-06-15 DOI:10.1109/PLASMA.2008.4590832

M. Bayrak, R. Brinkmann

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引用次数: 0

摘要

本文提出了一种新的求解简化动力学方程的数值方法。该技术基于计算流体力学中常用的有限体积控制方法。此外，在边界条件下考虑了护套的随机加热机制。此外，用准中性条件代替泊松方程求解势。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Stochastic heating in capacitively coupled plasmas

This paper presents a new numerical method for solving the reduced kinetic equation. This technique is based on the finite volume control method, which is often used in computational fluid dynamics. Additionally, in the boundary conditions the stochastic heating mechanism of the sheath is taken into account. Furthermore, the quasineutrality condition instead of the Poisson equation to solve the potential is used.

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来源期刊

2008 IEEE 35th International Conference on Plasma Science

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