{"title":"电容耦合等离子体中的随机加热","authors":"M. Bayrak, R. Brinkmann","doi":"10.1109/PLASMA.2008.4590832","DOIUrl":null,"url":null,"abstract":"This paper presents a new numerical method for solving the reduced kinetic equation. This technique is based on the finite volume control method, which is often used in computational fluid dynamics. Additionally, in the boundary conditions the stochastic heating mechanism of the sheath is taken into account. Furthermore, the quasineutrality condition instead of the Poisson equation to solve the potential is used.","PeriodicalId":6359,"journal":{"name":"2008 IEEE 35th International Conference on Plasma Science","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2008-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Stochastic heating in capacitively coupled plasmas\",\"authors\":\"M. Bayrak, R. Brinkmann\",\"doi\":\"10.1109/PLASMA.2008.4590832\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a new numerical method for solving the reduced kinetic equation. This technique is based on the finite volume control method, which is often used in computational fluid dynamics. Additionally, in the boundary conditions the stochastic heating mechanism of the sheath is taken into account. Furthermore, the quasineutrality condition instead of the Poisson equation to solve the potential is used.\",\"PeriodicalId\":6359,\"journal\":{\"name\":\"2008 IEEE 35th International Conference on Plasma Science\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-06-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 IEEE 35th International Conference on Plasma Science\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/PLASMA.2008.4590832\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE 35th International Conference on Plasma Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PLASMA.2008.4590832","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Stochastic heating in capacitively coupled plasmas
This paper presents a new numerical method for solving the reduced kinetic equation. This technique is based on the finite volume control method, which is often used in computational fluid dynamics. Additionally, in the boundary conditions the stochastic heating mechanism of the sheath is taken into account. Furthermore, the quasineutrality condition instead of the Poisson equation to solve the potential is used.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
