静电梳状驱动MEMS扫描镜的非线性研究

The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2014-04-13 DOI:10.1109/NEMS.2014.6908793

P. Deng, Wei Ma

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引用次数: 5

摘要

在这项工作中，我们系统地研究了静电梳子驱动的微扫描镜的非线性现象。系统控制方程用Mathieu方程表示。根据控制方程在MatLab中建立了数值模型。仿真了扫描镜在时域和频域的响应。实验结果通过自制的MEMS扫描镜验证。实验结果与仿真结果一致，显示出相似的参数响应和刚度软化。模型还观察到不稳定区域，并进行了验证。

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Nonlinearity investigation of the MEMS scanning mirror with electrostatic comb drive

In this work, we systematically investigate the nonlinear phenomenon of an electrostatic comb driven micro scanning mirror. The system governing equation is illustrated by Mathieu equation. A numerical model is built in MatLab based on the governing equation. The scanning mirror response in both time and frequency domain is simulated. Results are verified by the investigation vehicle, a fabricated MEMS scanning mirror. The experimental and simulation results have a great agreement on showing the similar parametric response and stiffness softening. Unstable region is also observed and well validated by the model.

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The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

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