{"title":"RF-MEMS开关机电响应建模","authors":"D. Elata","doi":"10.1109/ESIME.2006.1644058","DOIUrl":null,"url":null,"abstract":"In this work systematic approaches for extracting parameters of the static and dynamic response of electrostatic switches are presented. A novel strategy enables accurate and efficient extraction of the static pull-in state of voltage and charge driven actuators. Another strategy enables to extract parameters of the dynamic pull-in while only considering static states of the system","PeriodicalId":60796,"journal":{"name":"微纳电子与智能制造","volume":"122 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2006-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Modeling the Electromechanical Response of RF-MEMS Switches\",\"authors\":\"D. Elata\",\"doi\":\"10.1109/ESIME.2006.1644058\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work systematic approaches for extracting parameters of the static and dynamic response of electrostatic switches are presented. A novel strategy enables accurate and efficient extraction of the static pull-in state of voltage and charge driven actuators. Another strategy enables to extract parameters of the dynamic pull-in while only considering static states of the system\",\"PeriodicalId\":60796,\"journal\":{\"name\":\"微纳电子与智能制造\",\"volume\":\"122 1\",\"pages\":\"1-4\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-04-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"微纳电子与智能制造\",\"FirstCategoryId\":\"1087\",\"ListUrlMain\":\"https://doi.org/10.1109/ESIME.2006.1644058\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"微纳电子与智能制造","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.1109/ESIME.2006.1644058","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Modeling the Electromechanical Response of RF-MEMS Switches
In this work systematic approaches for extracting parameters of the static and dynamic response of electrostatic switches are presented. A novel strategy enables accurate and efficient extraction of the static pull-in state of voltage and charge driven actuators. Another strategy enables to extract parameters of the dynamic pull-in while only considering static states of the system
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