利用亚波长光栅集成静电梳状驱动器制备可调谐等离子体彩色滤光片

H. Honma, K. Takahashi, M. Ishida, K. Sawada
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引用次数: 4

摘要

本文提出了一种基于表面等离子体的可调谐滤色器,该滤色器采用铝(Al)亚波长光栅,由静电梳状驱动器驱动。我们还制作了集成Al铰链和可拉伸聚苯乙烯- c铰链的致动器,用于不断改变Al亚波长光栅的周期。450nm间距的独立式铝亚波长光栅在450nm波长上通过tm偏振光实现了非凡的光传输。我们在45 V的电压下获得了具有可伸缩铰链的致动器的225 nm位移,在12 V的电压下获得了具有Al铰链的致动器的750 nm位移。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fabrication of tunable plasmonic color filter using al subwavelength grating integrated with electrostatic comb-drive actuator
This paper presents a surface-plasmons-based tunable color filter using aluminum (Al) subwavelength grating operated by an electrostatic comb-drive actuator. We also fabricate the actuator integrated with an Al hinge and a stretchable parylene-C hinge that are used to constantly change the period of the Al subwavelength grating. Freestanding Al subwavelength grating with 450 nm pitch performed extraordinary optical transmission at 450 nm wavelength by TM-polarized light. We obtained a 225 nm displacement of the actuator having the stretchable hinges by applied voltage of 45 V, and a 750 nm displacement of the actuator having the Al hinges by applied voltage of 12 V.
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