铬原子光刻

U. Drodofsky, M. Drewsen, B. Brezger, G. Schreiber, D. Krogmann, C. Weber, J. Stuhler, T. Pfau, J. MIynsk
{"title":"铬原子光刻","authors":"U. Drodofsky, M. Drewsen, B. Brezger, G. Schreiber, D. Krogmann, C. Weber, J. Stuhler, T. Pfau, J. MIynsk","doi":"10.1109/CLEOE.1996.562396","DOIUrl":null,"url":null,"abstract":"Standing laser waves serve as an array of lenses for a well collimated and laser cooled chromium beam. A siljcon substrate put inlo the focal plane of that array can be patterned with lines or dots with a periodicity of half the wavelength of the light [l]. We report on an intenfie beam (at 80 cm from the nomce the 5nx corresponds to an evaporation rate of 0.8 A/E) of chromium We produce up to 300 mW of laser light (425 nm) by frequency doubling a TkSaphire-laser in a KNbO3-crystal. We did systematic studies of Dopplerand Sisyphus-cooling mechanisms in different configurations and can cool the chromium beam transversely down to a few recoil units The m u l l s are in excellent agreement with quantum Monte Carlo simulations. In contrast to mechanically coUimatiiig t h P bea.m we do not loomintenuity in the atomic beam, leading to deposition timea a6 high as 10 nmimin We report on experimentfi o n wr i t ing periodic nanostracturea (see fig. 1) with chromium with standing light fields generated by (.his syfitem. The written structures are characterised with an atomic force microscope. In a fiitilrr t l t ~ p t l i e scheme will be extended to two dimensions and different patterns.","PeriodicalId":11780,"journal":{"name":"EQEC'96. 1996 European Quantum Electronic Conference","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2002-08-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Atom Lithography with Chromium\",\"authors\":\"U. Drodofsky, M. Drewsen, B. Brezger, G. Schreiber, D. Krogmann, C. Weber, J. Stuhler, T. Pfau, J. MIynsk\",\"doi\":\"10.1109/CLEOE.1996.562396\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Standing laser waves serve as an array of lenses for a well collimated and laser cooled chromium beam. A siljcon substrate put inlo the focal plane of that array can be patterned with lines or dots with a periodicity of half the wavelength of the light [l]. We report on an intenfie beam (at 80 cm from the nomce the 5nx corresponds to an evaporation rate of 0.8 A/E) of chromium We produce up to 300 mW of laser light (425 nm) by frequency doubling a TkSaphire-laser in a KNbO3-crystal. We did systematic studies of Dopplerand Sisyphus-cooling mechanisms in different configurations and can cool the chromium beam transversely down to a few recoil units The m u l l s are in excellent agreement with quantum Monte Carlo simulations. In contrast to mechanically coUimatiiig t h P bea.m we do not loomintenuity in the atomic beam, leading to deposition timea a6 high as 10 nmimin We report on experimentfi o n wr i t ing periodic nanostracturea (see fig. 1) with chromium with standing light fields generated by (.his syfitem. The written structures are characterised with an atomic force microscope. In a fiitilrr t l t ~ p t l i e scheme will be extended to two dimensions and different patterns.\",\"PeriodicalId\":11780,\"journal\":{\"name\":\"EQEC'96. 1996 European Quantum Electronic Conference\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-08-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"EQEC'96. 1996 European Quantum Electronic Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CLEOE.1996.562396\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"EQEC'96. 1996 European Quantum Electronic Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CLEOE.1996.562396","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

驻波激光作为一个阵列的透镜为一个良好的准直和激光冷却铬束。将硅衬底置于该阵列的焦平面中,可以用周期性为光波长一半的线或点来形成图案[1]。我们报道了铬的强光束(距离中心80厘米处,5nx对应于0.8 A/E的蒸发速率)。我们通过在knbo3晶体中加倍频率的tksaphire激光器产生高达300 mW (425 nm)的激光。我们对不同构型的多普勒和西西弗斯冷却机制进行了系统的研究,并可以将铬束横向冷却到几个反冲单位,这与量子蒙特卡罗模拟结果非常吻合。与机械计算P值相反。我们报道了一项实验,利用()产生的恒光场,用铬制备周期纳米结构(见图1)。他的syfitem。用原子力显微镜对书写结构进行了表征。在此基础上,将该方案扩展到二维和不同的模式。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Atom Lithography with Chromium
Standing laser waves serve as an array of lenses for a well collimated and laser cooled chromium beam. A siljcon substrate put inlo the focal plane of that array can be patterned with lines or dots with a periodicity of half the wavelength of the light [l]. We report on an intenfie beam (at 80 cm from the nomce the 5nx corresponds to an evaporation rate of 0.8 A/E) of chromium We produce up to 300 mW of laser light (425 nm) by frequency doubling a TkSaphire-laser in a KNbO3-crystal. We did systematic studies of Dopplerand Sisyphus-cooling mechanisms in different configurations and can cool the chromium beam transversely down to a few recoil units The m u l l s are in excellent agreement with quantum Monte Carlo simulations. In contrast to mechanically coUimatiiig t h P bea.m we do not loomintenuity in the atomic beam, leading to deposition timea a6 high as 10 nmimin We report on experimentfi o n wr i t ing periodic nanostracturea (see fig. 1) with chromium with standing light fields generated by (.his syfitem. The written structures are characterised with an atomic force microscope. In a fiitilrr t l t ~ p t l i e scheme will be extended to two dimensions and different patterns.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信