{"title":"一种基于通用目标检测网络的晶圆表面缺陷检测方法","authors":"Xinyu Wang, Xiaoli Jia, Chuyi Jiang, Sanxin Jiang","doi":"10.2139/ssrn.4027241","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":11342,"journal":{"name":"Digit. Signal Process.","volume":"21 1","pages":"103718"},"PeriodicalIF":0.0000,"publicationDate":"2022-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":"{\"title\":\"A wafer surface defect detection method built on generic object detection network\",\"authors\":\"Xinyu Wang, Xiaoli Jia, Chuyi Jiang, Sanxin Jiang\",\"doi\":\"10.2139/ssrn.4027241\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":11342,\"journal\":{\"name\":\"Digit. Signal Process.\",\"volume\":\"21 1\",\"pages\":\"103718\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"9\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Digit. Signal Process.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.2139/ssrn.4027241\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digit. Signal Process.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2139/ssrn.4027241","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 9