微型MOEMS气敏光谱仪技术

2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI:10.1109/OMN.2013.6659058

J. Antila, A. Rissanen, R. Mannila, J. Makynen, I. Nakki, M. Tuohiniemi

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引用次数: 1

摘要

VTT开发了一种小型化的中红外光谱仪系统，用于利用表面微机械可调谐MOEMS法布里-珀罗干涉仪(FPI)进行气体传感。MOEMS FPI使用单像素探测器实现高质量的光谱测量，从而避免了昂贵的线性阵列探测器。与传统的非色散红外(NDIR)传感器相比，该测量方案提高了传感器的特异性和鲁棒性。

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Miniaturized MOEMS spectrometer technology for gas sensing

VTT has developed a miniaturized mid-IR spectrometer system for gas sensing utilizing a surface micromachined tunable MOEMS Fabry-Perot Interferometer (FPI). The MOEMS FPI enables high-quality spectral measurements using a single-pixel detector, thus avoiding expensive linear array detectors. This measurement scheme increases sensor specificity and robustness compared to conventional Nondispersive Infrared (NDIR) sensors.

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2013 International Conference on Optical MEMS and Nanophotonics (OMN)

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