带图像放大器的多光束投影微干涉仪

A. M. Bakiev, S. Valiev, N. V. Kryazhev
{"title":"带图像放大器的多光束投影微干涉仪","authors":"A. M. Bakiev, S. Valiev, N. V. Kryazhev","doi":"10.1070/QE1992V022N08ABEH003589","DOIUrl":null,"url":null,"abstract":"An experimental investigation was made of the principal properties of a multibeam projection microinterferometer with a copper-vapor image amplifier. The optical system and the operating principle of the microinterferometer are described. It is shown that the lower limit of the height of a microstructure which can be determined is less than 10 nm. If the edges of the microstructure are sharp, the upper limit can reach 5λ, where λ = 0.5782 μm is the wavelength of the radiation of the copper-vapor image amplifier.","PeriodicalId":21878,"journal":{"name":"Soviet Journal of Quantum Electronics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1992-08-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"MULTIBEAM PROJECTION MICROINTERFEROMETER WITH AN IMAGE AMPLIFIER\",\"authors\":\"A. M. Bakiev, S. Valiev, N. V. Kryazhev\",\"doi\":\"10.1070/QE1992V022N08ABEH003589\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An experimental investigation was made of the principal properties of a multibeam projection microinterferometer with a copper-vapor image amplifier. The optical system and the operating principle of the microinterferometer are described. It is shown that the lower limit of the height of a microstructure which can be determined is less than 10 nm. If the edges of the microstructure are sharp, the upper limit can reach 5λ, where λ = 0.5782 μm is the wavelength of the radiation of the copper-vapor image amplifier.\",\"PeriodicalId\":21878,\"journal\":{\"name\":\"Soviet Journal of Quantum Electronics\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1992-08-31\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Soviet Journal of Quantum Electronics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1070/QE1992V022N08ABEH003589\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Soviet Journal of Quantum Electronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1070/QE1992V022N08ABEH003589","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

实验研究了带铜蒸气图像放大器的多光束投影式微干涉仪的主要性能。介绍了微干涉仪的光学系统和工作原理。结果表明,可以确定的微观结构的高度下限小于10 nm。如果微结构边缘较锐利,其上限可达5λ,其中λ = 0.5782 μm为铜蒸气图像放大器的辐射波长。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
MULTIBEAM PROJECTION MICROINTERFEROMETER WITH AN IMAGE AMPLIFIER
An experimental investigation was made of the principal properties of a multibeam projection microinterferometer with a copper-vapor image amplifier. The optical system and the operating principle of the microinterferometer are described. It is shown that the lower limit of the height of a microstructure which can be determined is less than 10 nm. If the edges of the microstructure are sharp, the upper limit can reach 5λ, where λ = 0.5782 μm is the wavelength of the radiation of the copper-vapor image amplifier.
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