Алексей Евгеньевич Климов, В. А. Голяшов, Д В Горшков, Е.В. Матюшенко, Игорь Георгиевич Неизвестный, Г. И. Сидоров, Н. С. Пащин, С.П. Супрун, О. Е. Терещенко
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引用次数: 0

摘要

本文介绍了用分子束外延法制备PbSnTe:In薄膜的Al2O3薄膜栅极介质制备晶体管型MIS结构(MIST)及其性能。研究了在Т = 4.2 К时,MIST的源漏电流-电压特性(CVC)和栅极特性。结果表明:在n ~ 1017 cm-3的薄膜中,在栅极电压- 10v < Ugate < + 10v范围内,通道电流的调制率可达7% ~ 8%。考虑了源漏CVC的特性以及Ugate脉冲和锯齿变化的栅极特性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
МДП транзистор на основе пленки PbSnTe : In с подзатворным диэлектриком Al-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=--=SUP=-*-=/SUP=-
Results on the creation and properties of transistor-type MIS structures (MIST) with an Al2O3 thin-film gate dielectric based on PbSnTe:In films obtained by molecular beam epitaxy are presented. The source-drain current-voltage characteristics (CVC) and gate characteristics of the MIST at Т = 4.2 К have been investigated. It is shown that in MIST based on PbSnTe:In films with n ~ 1017 cm-3 the modulation of the channel current reaches 7 – 8 % in the range of gate voltages – 10 V < Ugate < + 10 V. The features of the source-drain CVC and the gate characteristics for a pulsed and sawtooth variation of Ugate are considered.
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