装配基于mems的Wolter i型x射线光学器件，用于未来的行星探测任务

2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI:10.1109/OMN.2013.6659086

I. Mitsuishi, Y. Ezoe, T. Ogawa, T. Kakiuchi, Masahiro Ikuta, T. Hayashi, Toshiki Sato, T. Ohashi, K. Mitsuda, K. Morishita, K. Nakajima

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引用次数: 1

摘要

我们一直在为未来的天文任务(如行星探测任务)开发基于mems的原始x射线光学系统。本文报道了两级mems光学器件的首次x射线辐照试验结果。得到的聚焦图像的FWHM为13±2 arcmin。然而，掩星效应和变形精度可能影响有效面积的减小。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Assembly of a MEMS-based Wolter type-I X-ray optic toward a future planetary exploration mission

We have been developing original MEMS-based X-ray optics toward future astronomical missions such as a planetary exploration mission. In this paper, we report results on the first X-ray irradiation test for a 2-stage MEMS-based optic. The obtained FWHM of the focusing image is 13±2 arcmin. However, an occultation effect and a deformation accuracy possibly affect a reduction of effective area.

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2013 International Conference on Optical MEMS and Nanophotonics (OMN)

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