A 35fJ/Step differential successive approximation capacitive sensor readout circuit with quasi-dynamic operation

We propose a successive-approximation capacitive sensor readout circuit that achieves 35fJ/Step energy efficiency FoM, which represents 4× improvement over the state-of-the-art. A fully differential architecture is employed to provide robustness against common mode noise and errors. An inverter-based amplifier with near-threshold biasing provides robust, fast, and energy-efficient operation. Quasi-dynamic operation is used to maintain the energy efficiency for a scalable sample rate. A hybrid coarse-fine capacitive DAC achieves 11.7bit effective resolution in a compact area.