Wei Guang-pu, Zhang Zhi-lin, Zhao Wei-ming, Gao Xiang-Hong, Chen Wei-Qun, H. Tanamura, M. Yamaguchi, H. Noguchi, T. Nagatomo, O. Omoto
{"title":"用于光伏应用的射频溅射SnS薄膜的研究","authors":"Wei Guang-pu, Zhang Zhi-lin, Zhao Wei-ming, Gao Xiang-Hong, Chen Wei-Qun, H. Tanamura, M. Yamaguchi, H. Noguchi, T. Nagatomo, O. Omoto","doi":"10.1109/WCPEC.1994.519977","DOIUrl":null,"url":null,"abstract":"Tin sulfide (SnS) solar cell semiconductor thin films were prepared by an RF sputtering method. The component, crystal structure, optical properties and electrical properties of SnS films were measured. The relationship between the SnS films properties and the sputtering condition was discussed. Using Sb as a dopant and combining thermal annealing at elevated temperatures (about 400/spl deg/C), n-type SnS homojunction solar cell thin films were obtained.","PeriodicalId":20517,"journal":{"name":"Proceedings of 1994 IEEE 1st World Conference on Photovoltaic Energy Conversion - WCPEC (A Joint Conference of PVSC, PVSEC and PSEC)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1994-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"14","resultStr":"{\"title\":\"Investigation on SnS film by RF sputtering for photovoltaic application\",\"authors\":\"Wei Guang-pu, Zhang Zhi-lin, Zhao Wei-ming, Gao Xiang-Hong, Chen Wei-Qun, H. Tanamura, M. Yamaguchi, H. Noguchi, T. Nagatomo, O. Omoto\",\"doi\":\"10.1109/WCPEC.1994.519977\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Tin sulfide (SnS) solar cell semiconductor thin films were prepared by an RF sputtering method. The component, crystal structure, optical properties and electrical properties of SnS films were measured. The relationship between the SnS films properties and the sputtering condition was discussed. Using Sb as a dopant and combining thermal annealing at elevated temperatures (about 400/spl deg/C), n-type SnS homojunction solar cell thin films were obtained.\",\"PeriodicalId\":20517,\"journal\":{\"name\":\"Proceedings of 1994 IEEE 1st World Conference on Photovoltaic Energy Conversion - WCPEC (A Joint Conference of PVSC, PVSEC and PSEC)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-12-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"14\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of 1994 IEEE 1st World Conference on Photovoltaic Energy Conversion - WCPEC (A Joint Conference of PVSC, PVSEC and PSEC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/WCPEC.1994.519977\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1994 IEEE 1st World Conference on Photovoltaic Energy Conversion - WCPEC (A Joint Conference of PVSC, PVSEC and PSEC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/WCPEC.1994.519977","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Investigation on SnS film by RF sputtering for photovoltaic application
Tin sulfide (SnS) solar cell semiconductor thin films were prepared by an RF sputtering method. The component, crystal structure, optical properties and electrical properties of SnS films were measured. The relationship between the SnS films properties and the sputtering condition was discussed. Using Sb as a dopant and combining thermal annealing at elevated temperatures (about 400/spl deg/C), n-type SnS homojunction solar cell thin films were obtained.