批量加工过程成品率的有效测试方法

Q3 Engineering
M. Liao, Chien-Wei Wu
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引用次数: 1

摘要

批量制造工艺已广泛应用于各种制造工艺中,如太阳能电池制造中的晶圆制造、集成电路制造和网格线印刷工艺。在批量生产过程中,产品是分批生产的。因此,总的工艺变化通常分为批间变化和批内变化。本研究的主要目的是提供一种有效的方法来测试批量加工过程的收率。在单向随机效应模型的基础上,利用广义枢纽量建立评价工艺良率指标的广义置信区间。仿真结果表明,该方法的经验覆盖概率不受批量效应的影响,随着批量大小的增加,其经验覆盖概率仍接近于标称覆盖概率。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Efficient Method for Testing the Batch-Processing Process Yield
Batch manufacturing processes have been widely used in various manufacturing processes, such as wafer fabrication, IC fabrication, and gridline printing process in the solar battery fabrication. In a batch manufacturing process, products are produced batch-by-batch. Thus, total process variations are generally divided into batch-by-batch variation and within-batch variation. The main purpose of this study is to provide an efficient method for testing the batch-processing process yield. Base on the one-way random effect model, the generalized pivotal quantity is utilized to establish the generalized confidence interval for assessing the process yield index. By simulations, the proposed method shows that its empirical coverage probability is not affected by the batch effect, and is still close the nominal coverage probability as the batch size increases.
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来源期刊
International Journal of Information and Management Sciences
International Journal of Information and Management Sciences Engineering-Industrial and Manufacturing Engineering
CiteScore
0.90
自引率
0.00%
发文量
0
期刊介绍: - Information Management - Management Sciences - Operation Research - Decision Theory - System Theory - Statistics - Business Administration - Finance - Numerical computations - Statistical simulations - Decision support system - Expert system - Knowledge-based systems - Artificial intelligence
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