An electron tunneling sensor

New methods have been developed to implement position sensors based on electron tunneling. The electron tunneling methods enable position to be detected with sub-Ångstrom resolution using a compact mechanical structure and simple electronic control elements. A prototype accelerometer is the first sensor based on these principles; it shows reliable operation with a 10 μg/√Hz noise-limited sensitivity and abandwidth of approximately 3 kHz. Based on these results, it is expected that tunnel sensors optimized for many applications will enable an entirely new class of sensors to be developed.