基于生成对抗网络的装配与测试制造综合缺陷生成

Rajhans Singh, Ravi Garg, Nital S. Patel, M. W. Braun
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引用次数: 9

摘要

缺陷检测和分类是任何半导体制造过程中的关键步骤。大多数情况下,它涉及人工创建缺陷,这是耗时的,包括高材料和人工成本。在本文中,我们提出了基于人工智能的综合缺陷生成技术来增强基于卷积神经网络(cnn)的缺陷检测和分类系统的训练图像集。具体来说,我们使用生成对抗网络(gan)来创建人工难以创建的各种缺陷模式。我们的研究结果表明,我们的适应性gan的输出是各种常见制造缺陷的逼真缺陷图像,包括异物,环氧树脂错位,划痕和模具脱落缺陷等。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Generative Adversarial Networks for Synthetic Defect Generation in Assembly and Test Manufacturing
Defect detection and classification is a critical step in any semiconductor manufacturing process. Most of the time it involves manual creation of defects which is time consuming and includes a high material and labor cost. In this paper we propose Artificial Intelligence-based synthetic defect generation techniques to augment the training image sets for Convolutional Neural Network (CNNs)-based defect detection and classification systems. Specifically, we use Generative Adversarial Networks (GANs) to create various modes of the defects which are difficult to create manually. Our results indicate that the output of our adapted GANs are images of realistic-looking defects for a wide variety of common manufacturing defects including foreign material, misplaced epoxy, scratches, and die chipping defects among others.
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