极紫外光源激光辅助放电等离子体的时间分辨观察

S. Katsuki, N. Tomimaru, T. Sakugawa, H. Akiyama
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摘要

本文制作了一种具有平面锡阴极和不锈钢球阳极的鸟笼式放电头,使我们能够很容易地接近等离子体。在锡阴极表面照射功率为1010 W/cm2的脉冲激光,将锡蒸气输送到5 mm的电极间隙,并在该间隙施加高压。气体击穿后的脉冲大电流(20 kA, 150 ns)通过电磁压缩和欧姆加热产生高密度热等离子体。等离子体压缩过程取决于激光照射到击穿的延迟时间dt,因为激光产生的蒸汽迅速膨胀,导致气体分布发生变化。当dt = 300 ns时,EUV发射强度最大,而发射区域最小。dt小于280 ns时不会发生击穿,因为气体密度可能不足以发生击穿。利用门控针孔极紫外光相机对极紫外光发射进行了时间分辨成像,结果表明热等离子体首先在阴极激光光斑附近产生,然后迅速向阳极迁移。热等离子体的迁移导致极紫外发射区域的扩大,这对光源是不利的。这一观察暗示了迁移的两种机制;一个是压力波的传播,另一个是感应电场加速下锡离子与电子的碰撞电离,其量级为1 MV/cm。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Time-resolved observation of laser-assisted discharge plasmas for EUV sources
In this paper a birdcage discharge head with a plane tin cathode and a stainless steel ball anode was fabricated which enables us to access to the plasma easily. A pulsed laser light with a fluence of 1010 W/cm2 was irradiated at a tin cathode surface to deliver tin vapor to the 5 mm electrode gap, where the high voltage was applied. High density hot plasmas were produced by the electromagnetic compression and the ohmic heating owing to the pulsed high current (20 kA, 150 ns) after the gaseous breakdown. The plasma compression process depends on the delay time dt from the laser irradiation to the breakdown because the laser produced vapor expands quickly, resulting in the change of the gas distribution. The EUV emission intensity was maximum when dt was 300 ns, while the emission region was minimum. The breakdown did not occur for dt smaller than 280 ns because the gas density might not be sufficiently large for the breakdown. The time-resolved imaging of the EUV emission using a gated pinhole EUV camera showed that the hot plasma was produced at first near the laser spot at the cathode and migrated toward the anode quickly. The migration of the hot plasma results in the enlargement of EUV emission region, which is unfavorable for a light source. The observation implies two mechanisms for the migration; one is the pressure wave propagation, and, the other is the collisional ionization of tin ions with electrons accelerated by the induced electric field, which is on the order of 1 MV/cm.
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