微加工行波管的发展

L. Ives, C. Kory, M. Read, G. Miram, J. Booske
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引用次数: 0

摘要

小结构制造技术的进步促进了高频电子器件的发展。光刻技术,类似于半导体工业所使用的技术,允许构建具有微米尺寸特征的组件,包括模式转换器,射频窗口,场发射阵列阴极和射频电路。本文介绍了该技术在高数据速率通信高频行波管开发中的应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development of microfabricated traveling wave tubes
Advances in manufacturing techniques for small structures are facilitating the development of high frequency electron devices. Lithographic techniques, similar to those used by the semiconductor industry, are allowing construction of components with micron-size features, including mode converters, RF windows, field emission array cathodes, and RF circuits. This presentation describes the application of this technology to the development of high frequency traveling wave tubes for high data rate communications.
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