全反射x射线荧光(TXRF)检测Si(100)表面微量金属杂质

{"title":"全反射x射线荧光(TXRF)检测Si(100)表面微量金属杂质","authors":"V. Penka, W. Hub","doi":"10.1007/BF00572381","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":12372,"journal":{"name":"Fresenius' Zeitschrift für analytische Chemie","volume":"88 1","pages":"586-589"},"PeriodicalIF":0.0000,"publicationDate":"1989-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"27","resultStr":"{\"title\":\"Detection of metallic trace impurities on Si(100) surfaces with total reflection X-ray fluorescence (TXRF)\",\"authors\":\"V. Penka, W. Hub\",\"doi\":\"10.1007/BF00572381\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":12372,\"journal\":{\"name\":\"Fresenius' Zeitschrift für analytische Chemie\",\"volume\":\"88 1\",\"pages\":\"586-589\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1989-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"27\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Fresenius' Zeitschrift für analytische Chemie\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1007/BF00572381\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Fresenius' Zeitschrift für analytische Chemie","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/BF00572381","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}