微换能器用压电薄膜

Soonjae Jung, S. Baek
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引用次数: 0

摘要

压电材料可以直接将机械能转化为电能,反之亦然。压电材料和器件的研究历史悠久,现在许多相关产品在医疗、军事、工业、家电、移动电子等领域得到了广泛的应用。目前的主要研究方向之一是进一步提高压电材料的物理性能,同时减小压电器件的尺寸。本文综述了压电薄膜在提高微换能器性能方面的研究进展。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Piezoelectric Thin Films for Microtransducer
s Piezoelectric materials can directly convert mechanical energy to electrical one, and vice versa. Research on piezoelectric materials and devices has a long history, and now many relevant products are available in a wide range of applications such as medical, military, industrial, home appliance, and mobile electronics. One of the major research trends now is not only to further improve the physical properties of the piezoelectric materials, but also to reduce the size of the piezoelectric devices. This review focuses on the development of piezoelectric thin films that can enhance the performance of microtransducers.
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