Design and Analysis of Micro-Opto-Mechanical System Cantilever Integrated with Photonics Waveguide for Pressure Sensing Applications

In this work, the pressure sensing approach based on the Micro-Opto-Mechanical System (MOMS) cantilever integrated with waveguide structure has been explored. The MOMS based photonic sensors are drawing attention because of their high sensing capabilities. In the design of MOMS based cantilever pressure sensor, mainly two different waveguide structures, Rib and Slot waveguides have been considered. The deviation in light intensity at the output of the waveguide structure is mainly used to analyze the amount of exerted pressure at the free-end of cantilever. Using the different waveguide parameters such as, effective mode area, light intensity variations, etc., the performance comparison between Rib and Slot waveguides have been done. The relationship between the normalized light intensity at the waveguide output corresponding to the applied pressure has been established from the relationship between the deflection versus pressure and normalized intensity versus deflection. It has been anticipated that the performance of pressure sensor using Slot waveguide is significantly better than the Rib waveguide for some application.