一种角速率传感器接口集成电路

Proceedings of the ... Custom Integrated Circuits Conference. Custom Integrated Circuits Conference Pub Date : 1996-05-05 DOI:10.1109/CICC.1996.510565

S. Zarabadi, P.E. Castillo-Borelly, J.D. Johnson

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引用次数: 9

摘要

本文介绍了一种维持表面微机械横摆角速度传感器振动并处理其角速度信号的接口集成电路。此外，它还提供了必要的电子器件来补偿传感器的不均匀性、参数随温度的变化以及偏置和灵敏度的变化。该集成电路采用1.2 /spl mu/m CMOS工艺制造，其中包括一个高压MOS晶体管。几个关键电路模块和角速率传感器系统的实验结果表明，在温度和电源电压下都能正常工作。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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An angular rate sensor interface IC

This paper describes an interface IC that maintains the vibration of a surface micro-machined yaw rate sensor and processes its angular rate signal. In addition, it provides the necessary electronics to compensate for the nonuniformities, parameter shifts with temperature, and offset and sensitivity variations of the sensor. The IC has been fabricated in a 1.2 /spl mu/m CMOS process that includes a high voltage MOS transistor. Experimental results of several key circuit blocks and the angular rate sensor system indicate proper operation over temperature and supply voltage.

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来源期刊

Proceedings of the ... Custom Integrated Circuits Conference. Custom Integrated Circuits Conference

CiteScore

3.80

自引率

0.00%

发文量