用于快速原子力显微镜的双共振控制器

S. Das, H. Pota, I. Petersen
{"title":"用于快速原子力显微镜的双共振控制器","authors":"S. Das, H. Pota, I. Petersen","doi":"10.1109/ASCC.2013.6606209","DOIUrl":null,"url":null,"abstract":"This paper presents the design and implementation of a double resonant controller with an integral controller in the piezoelectric tube scanner (PTS) of an atomic force microscope (AFM) to damp the resonant mode of the scanner, increase the bandwidth of the overall closed-loop system, and improve the high speed imaging performance of the AFM. The X and Y axes of the PTS is treated as an independent single-input singleoutput system and the system is identified by using the measured open-loop data. In order to measure the performance of the proposed controller a comparison of the scanned images have been made by using the proposed controller and the built-in proportional-integral (PI) controller of the AFM. The comparison of the scanned images demonstrate the performance improvement achieved by the proposed controller.","PeriodicalId":6304,"journal":{"name":"2013 9th Asian Control Conference (ASCC)","volume":"2012 1","pages":"1-6"},"PeriodicalIF":0.0000,"publicationDate":"2013-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"Double resonant controller for fast atomic force microscopy\",\"authors\":\"S. Das, H. Pota, I. Petersen\",\"doi\":\"10.1109/ASCC.2013.6606209\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents the design and implementation of a double resonant controller with an integral controller in the piezoelectric tube scanner (PTS) of an atomic force microscope (AFM) to damp the resonant mode of the scanner, increase the bandwidth of the overall closed-loop system, and improve the high speed imaging performance of the AFM. The X and Y axes of the PTS is treated as an independent single-input singleoutput system and the system is identified by using the measured open-loop data. In order to measure the performance of the proposed controller a comparison of the scanned images have been made by using the proposed controller and the built-in proportional-integral (PI) controller of the AFM. The comparison of the scanned images demonstrate the performance improvement achieved by the proposed controller.\",\"PeriodicalId\":6304,\"journal\":{\"name\":\"2013 9th Asian Control Conference (ASCC)\",\"volume\":\"2012 1\",\"pages\":\"1-6\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-06-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 9th Asian Control Conference (ASCC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ASCC.2013.6606209\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 9th Asian Control Conference (ASCC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASCC.2013.6606209","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 6

摘要

为了抑制原子力显微镜(AFM)压电管扫描仪(PTS)的谐振模式,增加整个闭环系统的带宽,提高原子力显微镜(AFM)的高速成像性能,设计并实现了一种带有积分控制器的双谐振控制器。将PTS的X轴和Y轴视为独立的单输入单输出系统,并利用测量的开环数据对系统进行识别。为了测量所提出的控制器的性能,将所提出的控制器与AFM内置的比例积分(PI)控制器进行了扫描图像的比较。扫描图像的对比表明,所提出的控制器取得了性能上的改进。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Double resonant controller for fast atomic force microscopy
This paper presents the design and implementation of a double resonant controller with an integral controller in the piezoelectric tube scanner (PTS) of an atomic force microscope (AFM) to damp the resonant mode of the scanner, increase the bandwidth of the overall closed-loop system, and improve the high speed imaging performance of the AFM. The X and Y axes of the PTS is treated as an independent single-input singleoutput system and the system is identified by using the measured open-loop data. In order to measure the performance of the proposed controller a comparison of the scanned images have been made by using the proposed controller and the built-in proportional-integral (PI) controller of the AFM. The comparison of the scanned images demonstrate the performance improvement achieved by the proposed controller.
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