用于纳米传感的自传感石英晶体悬臂

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-09-24 DOI:10.1109/SENSOR.2007.4300682

Yu-Ching Lin, T. Ono, M. Esashi

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引用次数: 1

摘要

研制了一种at切割石英板自传感悬臂梁，在室温各种环境下实现了高灵敏度。采用深度反应离子刻蚀法制备的悬臂梁两侧为金属电极，其厚度为20 μ m。剪切-振动方向的外力引起了厚度-剪切振动模式下共振频率的变化。介绍了调频法检测厚度剪切振动的方法，并对其灵敏度和噪声水平进行了研究。

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Self-Sensing Quartz-Crystal Cantilever for Nanometric Sensing

A self-sensing cantilever of AT-cut quartz plate was developed to achieve a high sensitivity under various environments at room temperature. The cantilevers fabricated by deep reactive ion etching with metal electrodes at the both sides have the thicknesses of 20 mum. The external force at shear- vibration direction induces the resonant frequency changes at thickness-shear vibration mode. The frequency modulation (FM) detection of thickness-shear vibration was demonstrated and the sensitivity and noise lever were investigated.

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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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