高性能惯性导航级sigma-delta MEMS加速度计

Y. Dong, P. Zwahlen, A. Nguyen, F. Rudolf, J. Stauffer
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引用次数: 37

摘要

传统的惯性级加速度计是航空电子设备的重要部件,它基于振动石英结构,具有优良的动态范围。然而,在高冲击、高振动环境下,这类加速度计成本高,冲击后稳定性下降。MEMS制造工艺本身就是一种坚固耐用的技术,在恶劣环境和安全关键应用方面具有巨大的潜力,可以提出新的解决方案。本文报道了一种针对惯性导航应用的高性能闭环MEMS加速度计。追求的首要目标不是低成本和小尺寸,而是性能;MEMS加速度计的规格与非常高性能的加速度计竞争。演示的MEMS加速度计是一种批量制造的电容式传感器,其输入满量程为11g,带宽为300 Hz,由高度优化的闭环电子器件控制。1位σ - δ 5阶调节回路显著改善了线性度,从而提高了振动整流因子(VRE)。偏置稳定性的主要改进来自MEMS设计和工艺流程。测量结果表明,长期偏置稳定性为±0.1mg, VRE优于10µg/g2,带内本底噪声为1µg/vHz, 100 Hz带宽下动态范围为120dB。另一个吸引人的地方是MEMS加速度计的低功耗,这使得功耗关键应用在未来的无人驾驶飞行器(UAV)中成为可能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
High performance inertial navigation grade sigma-delta MEMS accelerometer
Traditional inertial grade accelerometers, based on vibrating quartz structures, which have excellent dynamic range, are vital components in avionics. However, such kinds of accelerometers suffer from high cost and exhibit post-shock stability degradation in particular high-shock, high-vibration environments. MEMS fabrication process is an inherently rugged technology and has great potential to bring forth novel solutions on the harsh environment and safety critical applications. This paper reports on a very high performance closed-loop MEMS accelerometer targeted at inertial navigation applications. The chasing primary goal is not for the lower costs and small size, but the performance; the MEMS accelerometer's specifications compete with very high performance accelerometers. The demonstrated MEMS accelerometer is a bulk manufactured capacitive sensor with 11g input full scale over a 300 Hz bandwidth, which is controlled by highly optimized closed-loop electronics. The one-bit sigma-delta 5th-order regulation loop leads to dramatic linearity improvement and consequently vibration rectification factor (VRE). The major improvement in bias stability comes from MEMS design and process flow. Measurements show a long-term bias stability of ±0.1mg, a VRE of better than 10µg/g2, an in-band noise floor of 1µg/vHz and a 120dB dynamic range in a 100 Hz bandwidth. Additional attraction is the low power consumption of the MEMS accelerometers, which makes the power consumption critical applications feasible in the future unmanned air vehicles (UAV).
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