用富氧化学计量学研究ZnO薄膜中受体缺陷的深能级发射

U. Ilyas, R. Rawat, T. Tan
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引用次数: 0

摘要

本文报道了在不同沉积后退火温度(500-800℃)和Mn掺杂浓度下富氧ZnO薄膜中受体缺陷的裁剪。XRD光谱显示ZnO薄膜的纳米晶性质,晶格参数变化不一致,表明结构缺陷的激活依赖于温度。光致发光光谱揭示了以受体存在为主要缺陷的深能级发射(DLE)的温度依赖性变化。随着温度的升高,天然缺陷的浓度增加,而随着掺杂浓度的增加,天然缺陷的浓度呈相反的趋势。随着Mn含量的增加,DLE光谱持续下降,表明ZnO光学带隙中的结构缺陷被淬灭,有利于形成高质量的薄膜,提高光学透明度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
SPECTROSCOPIC STUDY OF DEEP LEVEL EMISSIONS FROM ACCEPTOR DEFECTS IN ZnO THIN FILMS WITH OXYGEN RICH STOICHIOMETRY
This paper reports the tailoring of acceptor defects in oxygen rich ZnO thin films at different post-deposition annealing temperatures (500–800°C) and Mn doping concentrations. The XRD spectra exhibited the nanocrystalline nature of ZnO thin films along with inconsistent variation in lattice parameters suggesting the temperature-dependent activation of structural defects. Photoluminescence emission spectra revealed the temperature dependent variation in deep level emissions (DLE) with the presence of acceptors as dominating defects. The concentration of native defects was estimated to be increased with temperature while a reverse trend was observed for those with increasing doping concentration. A consistent decrease in DLE spectra, with increasing Mn content, revealed the quenching of structural defects in the optical band gap of ZnO favorable for good quality thin films with enhanced optical transparency.
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