{"title":"基于RF NEMS系列开关的600ghz 3位延迟线移相器设计","authors":"Y. Yang, K. Y. Chan, R. Ramer","doi":"10.1109/APS.2011.5997237","DOIUrl":null,"url":null,"abstract":"This paper presents for the first time a study on a 3-bit coplanar waveguide (CPW) NEMS phase shifter simulated and optimized at 600 GHz. Simulation results based on the Ansoft High Frequency Structure Simulator (HFSS) predict a return loss better than 19.5 dB for all bit combinations in the frequency band of 550 GHz to 650 GHz. A maximum phase error less of than 3.91 % is simulated. The dimension of the device is 59.3 µm × 37.8 µm. This is the first smallest 600 GHz RF NEMS phase shifter design up-to-date.","PeriodicalId":6449,"journal":{"name":"2011 IEEE International Symposium on Antennas and Propagation (APSURSI)","volume":"1 1","pages":"3287-3290"},"PeriodicalIF":0.0000,"publicationDate":"2011-07-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Design of 600 GHz 3-bit delay-line phase shifter using RF NEMS series switches\",\"authors\":\"Y. Yang, K. Y. Chan, R. Ramer\",\"doi\":\"10.1109/APS.2011.5997237\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents for the first time a study on a 3-bit coplanar waveguide (CPW) NEMS phase shifter simulated and optimized at 600 GHz. Simulation results based on the Ansoft High Frequency Structure Simulator (HFSS) predict a return loss better than 19.5 dB for all bit combinations in the frequency band of 550 GHz to 650 GHz. A maximum phase error less of than 3.91 % is simulated. The dimension of the device is 59.3 µm × 37.8 µm. This is the first smallest 600 GHz RF NEMS phase shifter design up-to-date.\",\"PeriodicalId\":6449,\"journal\":{\"name\":\"2011 IEEE International Symposium on Antennas and Propagation (APSURSI)\",\"volume\":\"1 1\",\"pages\":\"3287-3290\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-07-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 IEEE International Symposium on Antennas and Propagation (APSURSI)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/APS.2011.5997237\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 IEEE International Symposium on Antennas and Propagation (APSURSI)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/APS.2011.5997237","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Design of 600 GHz 3-bit delay-line phase shifter using RF NEMS series switches
This paper presents for the first time a study on a 3-bit coplanar waveguide (CPW) NEMS phase shifter simulated and optimized at 600 GHz. Simulation results based on the Ansoft High Frequency Structure Simulator (HFSS) predict a return loss better than 19.5 dB for all bit combinations in the frequency band of 550 GHz to 650 GHz. A maximum phase error less of than 3.91 % is simulated. The dimension of the device is 59.3 µm × 37.8 µm. This is the first smallest 600 GHz RF NEMS phase shifter design up-to-date.
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