两阶段法制备Cd(Zn)Te和CuInSe2薄膜及器件

Bulent M. Basol, Vijay K. Kapur
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引用次数: 14

摘要

采用两段法制备了Cd(Zn)Te和CuInSe2薄膜。该技术包括首先将化合物的元素成分以薄堆叠层的形式沉积到衬底上,然后将这些元素成分反应以获得所需化合物的薄膜。虽然CdTe薄膜生长在薄CdS层上具有均匀的化学测量和与底层CdS层的尖锐界面,但由于锌的活性性质,沉积在类似衬底上的CdZnTe薄膜会产生扩散的CdZnTeCdS界面。在CuInSe2加工中,反应的化合物膜的性质很大程度上取决于CuIn层的性质。CdS/CuInSe2器件效率也受到CdS窗口层沉积方法的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Preparation of Cd(Zn)Te and CuInSe2 films and devices by a two-stage process

The two-stage process was used to prepare thin films of Cd(Zn)Te and CuInSe2. The technique involves first depositing the elemental components of the compound onto a substrate in the form of thin stacked layers and then reacting these elemental components to obtain a thin film of the desired compound. While CdTe films grown on thin CdS layers have uniform stoichiometries and sharp interfaces with the underlying CdS layers, CdZnTe films deposited onto similar substrates give rise to diffused CdZnTeCdS interfaces because of the reactive nature of zinc. In CuInSe2 processing, the nature of the reacted compound film strongly depends on the nature of the CuIn layers. CdS/CuInSe2 device efficiencies are also influenced by the method of deposition for the CdS window layers.

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